Process Chamber Purging with Expandable Inert Gas Section
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Solution Overview
Problem
Existing process chambers require lengthy purging times and high gas consumption to achieve low oxygen concentrations, especially when frequently opened for processing, which is inefficient for applications like additive manufacturing and autoclaves.
Innovation Solution
A method involving a process chamber divided into a purging section and a remaining section, where the purging section's volume is manipulated to minimize gas mixing, allowing rapid purging with reduced gas consumption by introducing inert gas into the smaller purging section, which is then transferred to the larger remaining section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the process chamber is purged by introducing inert gas to displace oxygen, then oxygen concentration is reduced, but purging time becomes very long and gas consumption becomes high
Solution Approach 1:
The process chamber is divided into two separate chambers: a first chamber for holding the inert gas source and a second chamber for the actual process. A partition wall with a movable diaphragm separates these chambers. By manipulating the diaphragm, inert gas can be transferred from the first chamber to the second chamber, achieving rapid purging without requiring prolonged introduction of large volumes of gas.
Solution Approach 2:
The inert gas is pre-stored in the first chamber at a higher pressure before the purging operation. This preliminary preparation allows the gas to be quickly transferred to the second chamber when needed, eliminating the need for time-consuming gas introduction during the actual purging process.
2Reliability
If the process chamber is purged by introducing large volumes of inert gas, then oxygen concentration is reduced, but gas consumption becomes excessively high
Solution Approach 1:
The process chamber is divided into two separate chambers: a first chamber for holding the inert gas source and a second chamber for the actual process. A partition wall with a movable diaphragm separates these chambers. By manipulating the diaphragm, inert gas can be transferred from the first chamber to the second chamber, achieving rapid purging without requiring prolonged introduction of large volumes of gas.
Solution Approach 2:
The inert gas is pre-stored in the first chamber at a higher pressure before the purging operation. This preliminary preparation allows the gas to be quickly transferred to the second chamber when needed, eliminating the need for time-consuming gas introduction during the actual purging process.
3Ease of operation
If the process chamber is frequently opened for processing, then product access is enabled, but purging must be repeated frequently increasing time and gas consumption
Solution Approach 1:
The process chamber is divided into two separate chambers: a first chamber for holding the inert gas source and a second chamber for the actual process. A partition wall with a movable diaphragm separates these chambers. By manipulating the diaphragm, inert gas can be transferred from the first chamber to the second chamber, achieving rapid purging without requiring prolonged introduction of large volumes of gas.
Solution Approach 2:
The system changes the pressure parameter to enable rapid purging. The first chamber maintains higher pressure while the second chamber is at lower pressure during purging operations. This pressure differential allows quick gas transfer through the diaphragm, reducing purging time for frequent access operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly reduces purging time and gas consumption while maintaining low oxygen concentrations, enabling efficient transition to an inert atmosphere suitable for processes like additive manufacturing and autoclave operations.
Implementation Method 1
increasing a volume of the purging section of the process chamber, thereby decreasing a volume of the remaining section of the process chamber, wherein gas initially contained within the remaining section of the process chamber is removed from the process chamber
Data Source
Figure 1a~2c
Figure 3a~3c
Figure 4a~4c
AI summary
Method for purging a process chamber (1), comprising at least the following steps: a) providing a purging section (2) within the process chamber (1) such that a volume of the purging section (2) is smaller than a total volume of the process chamber (1), and b) introducing a purging gas into the purging section (2) of the process chamber (1). With the provided method a process chamber (1) can be purged with a purging gas such as nitrogen and/or argon at a particularly low consumption of the purging gas and/or with a particularly short purging time. This can be achieved by introducing the purging gas into a small purging section (2) of the process chamber (1), whereby the volume of the purging section (2) is increased.