Process Chamber Oxygen-Binding Structure for Low-Oxygen Manufacturing
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Solution Overview
Problem
Existing manufacturing processes face challenges in reducing oxygen content in process chambers to low levels (e.g., 10000 ppm or 0 ppm) within reasonable time and cost constraints, particularly in additive manufacturing and thermal processes, as conventional methods like purging with inert gases or high vacuum are inefficient or costly.
Innovation Solution
A process chamber equipped with a structure comprising a solid material that binds oxygen in the form of an oxide compound, where inert gas is used to purge and oxidize residual oxygen, effectively reducing the oxygen content through an oxidation reaction, with a heating source to enhance the oxidation rate and a means to regulate gas introduction for efficient oxygen binding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If purging with inert gas is used to reduce oxygen content, then apparatus costs are low, but purging time becomes very long (30 min to 2 h)
Solution Approach 1:
A solid oxygen-binding material is introduced as an intermediary substance within the process chamber. This material actively binds residual oxygen through chemical reaction, accelerating the oxygen removal process beyond what inert gas purging alone can achieve, while avoiding the need for expensive high-vacuum systems
Solution Approach 2:
The oxygen content reduction process transitions from purely physical displacement (inert gas purging) to a chemical reaction process (oxidation of solid material). This parameter change in the mechanism of oxygen removal dramatically reduces the time required to achieve low oxygen contents
2Loss of time
If high vacuum is applied to reduce oxygen content to below 500 ppm, then oxygen content reduction is achieved quickly, but apparatus costs become very high
Solution Approach 1:
The solid oxygen-binding material serves as a chemical intermediary that continues the oxygen removal process after inert gas purging. This intermediary enables achievement of very low oxygen contents (below 500 ppm) without requiring the continuous operation of expensive high-vacuum systems
Solution Approach 2:
The mechanical/high-vacuum system for oxygen removal is partially replaced by a chemical reaction system using the solid oxygen-binding material. This substitution maintains fast oxygen reduction capability while significantly reducing apparatus costs
3Ease of manufacture
If inert gas purging is used to achieve low oxygen content, then apparatus costs are reasonable, but the reduction follows an exponential curve requiring extremely long times for final reduction
Solution Approach 1:
The solid oxygen-binding material acts as a catalyst/intermediary that speeds up the final stage of oxygen removal. While inert gas purging handles the bulk reduction efficiently and cheaply, the solid material mediates the slow final reduction step, dramatically improving overall production cycle efficiency
Solution Approach 2:
The oxygen removal process is made continuous and accelerated by the solid oxygen-binding material, which continuously binds oxygen as it diffuses into the chamber during purging. This continuous chemical action prevents the exponential slowdown that occurs with purging alone
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for rapid and cost-effective reduction of oxygen content to extremely low levels (up to 0 ppm), reducing production cycle time by 15 to 90 minutes and preventing defects like micro-cracks and unwanted oxide formation, while ensuring high process quality and security.
Implementation Method 1
Passing the inert gas through the structure (3) for oxidizing the solid material with the residual oxygen in the process chamber body (1) and binding the reacted oxygen in form of an oxide compound within the structure (3)
Data Source
Figure 1
AI summary
The present invention relates to a process chamber comprising a structure (3) comprising a solid material suitable for binding oxygen in form of an oxide compound; a method for reducing the oxygen content in said process chamber, an apparatus comprising said process chamber and the use of said process chamber for manufacturing methods, such as additive manufacturing methods, thermal processes or hot isotactic pressing, in an atmosphere having an oxygen content of not more than 1000 ppm.