Process Chamber Purging Using Thermal Gas Density Control
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Solution Overview
Problem
Existing process chambers require long purging times and high gas consumption to achieve low oxygen concentrations, especially when frequently opened for processing, which is inefficient and costly.
Innovation Solution
A method involving increasing the temperature of the initial gas in the chamber and introducing a colder purging gas to reduce gas density, thereby reducing purging time and gas consumption, while maintaining an inert atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the process chamber is purged by introducing inert gas to displace oxygen, then oxygen concentration is reduced, but purging time and gas consumption increase significantly
Solution Approach 1:
The patent changes the temperature parameter of the gas in the process chamber. By heating the gas to increase its pressure and then rapidly cooling it to create a pressure differential, the invention accelerates the purging process. This thermal parameter change enables faster gas exchange without requiring excessive purging time or gas consumption.
Solution Approach 2:
The patent employs periodic heating and cooling cycles to achieve rapid purging. The gas is heated in cycles to increase pressure, then cooled to create suction effects that draw inert gas through the chamber. This periodic thermal action replaces continuous purging, reducing both time and gas consumption while maintaining effective oxygen removal.
2Object-affected harmful factors
If the process chamber is purged by introducing inert gas to displace oxygen, then oxygen concentration is reduced, but the amount of inert gas consumption increases
Solution Approach 1:
The patent utilizes temperature and pressure parameter changes to optimize inert gas consumption. By heating the gas to increase its pressure and then cooling it to create pressure differentials, the system achieves more efficient gas exchange. This reduces the volume of inert gas needed compared to conventional constant-pressure purging methods.
Solution Approach 2:
The periodic heating and cooling cycles create pressure variations that enhance gas exchange efficiency. During heating phases, high-pressure gas is expelled; during cooling phases, inert gas is drawn in more effectively. This periodic action reduces the total amount of inert gas required compared to continuous flow methods.
3Productivity
If the process chamber is frequently opened for processing, then product manufacturing is enabled, but purging frequency and gas consumption increase
Solution Approach 1:
The patent implements rapid thermal cycling that can be quickly executed between processing operations. The heating and cooling cycles are optimized for speed, allowing the chamber to be re-purged efficiently after each opening. This enables frequent processing cycles without proportionally increasing gas consumption.
Solution Approach 2:
The periodic thermal action creates a rapid purging mechanism that can be repeatedly applied between processing steps. Each heating-cooling cycle provides a complete purging action, allowing the chamber to be quickly prepared for the next process run. This maintains high productivity while limiting gas consumption per cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves rapid purging with significantly less gas consumption and shorter times, ensuring low oxygen concentrations suitable for additive manufacturing and autoclave processes.
Implementation Method 1
increasing a temperature of a gas initially contained in the process chamber
Implementation Method 2
increasing a temperature of a gas initially contained in the process chamber... which is below 0 °C
Data Source
Figure 1~2
Figure 3~4
AI summary
Method for purging a process chamber (1) comprising at least the following steps: a) increasing a temperature of a gas initially contained in the process chamber (1) at least to a first temperature, b) introducing a purging gas, which is at a second temperature, into the process chamber (1), wherein the first temperature is higher than the second temperature. With the provided a method process chamber (1) can be purged with a purging gas such as nitrogen and/or argon at a particularly low consumption of the purging gas and/or with a particularly short purging time. This can be achieved by increasing the temperature of the gas initially contained within the process chamber (1) prior to purging, thus reducing the density of this gas.