Process Data Display Layout for Recipe Trend Comparison
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Solution Overview
Problem
In semiconductor manufacturing, identifying the cause of failures due to recipe differences in semiconductor manufacturing apparatuses is challenging, as existing methods require significant time to collect and analyze data, making it difficult to promptly determine trends and overcome failures.
Innovation Solution
An information processing apparatus that acquires and displays process data from different substrate process conditions chronologically, allowing for the comparison of recipes by displaying data in separate regions on a graphical interface, facilitating the identification of trends and reducing analysis time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If process data from different recipes are displayed in a single graph, then it is easy to identify failures at a glance, but it becomes difficult to determine trends specific to each recipe
Solution Approach 1:
The patent divides the display area into multiple regions, with each region dedicated to displaying process data for a specific recipe. This segmentation allows users to view recipe-specific trends clearly while maintaining easy failure identification through the organized layout of multiple recipe displays.
2Measurement precision
If process data is collected and analyzed manually to determine recipe trends, then accurate analysis can be performed, but it takes a significant amount of time
Solution Approach 1:
The patent performs preliminary organization and arrangement of process data for each recipe in separate display regions before the user needs to analyze trends. This preliminary action eliminates the need for manual data collection and analysis, providing accurate recipe-specific trend information immediately when needed.
3Device complexity
If all process data is displayed in one location, then the display is simple, but it becomes difficult to compare different recipes chronologically
Solution Approach 1:
The patent transitions from a single-dimension display (one graph for all recipes) to a multi-dimensional display by organizing process data for different recipes into separate spatial regions. This dimensional change enables chronological comparison of multiple recipes while maintaining display organization and simplicity.
Data Source
AI summary
An information processing apparatus includes an acquisition unit configured to acquire information containing first process data indicating a result of a substrate process in a first process condition and second process data indicating a result of a substrate process in a second process condition different from the first process condition, and a display control unit configured to control a display on a display apparatus based on the information acquired by the acquisition unit, wherein the display control unit is configured to display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region.