Process Flow Checking System for Semiconductor Manufacturing
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Solution Overview
Problem
Manual checking of semiconductor process flows in semiconductor manufacturing lines is time-consuming and labor-intensive, leading to potential contamination and yield reduction if mistakes occur, affecting productivity and reliability.
Innovation Solution
A process flow checking system comprising a manufacturing route generator, rule-information storage, and a check processor that automatically verifies the appropriateness of process orders by comparing manufacturing route information with stored rule information, reducing human error and increasing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual checking of process flows is performed, then flexibility and adaptability are maintained, but time consumption and labor requirements increase significantly
Solution Approach 1:
The patent replaces manual mechanical checking processes with an automated information processing system. The check processor automatically retrieves process flow information, compares it against predetermined rules, and generates check results without human intervention, thereby eliminating the time-consuming manual checking process while maintaining checking accuracy.
Solution Approach 2:
The system enables self-service checking where the process flow information automatically compares itself against stored rules. The check processor autonomously performs the verification by retrieving process flow data, matching it with predetermined rules, and generating check results without requiring external manual intervention, thus reducing checking time significantly.
2Reliability
If manual checking of process flows is performed, then complex rule evaluation can be adapted, but labor intensity and error risk increase
Solution Approach 1:
The patent replaces manual checking operations with automated information processing. The check processor automatically retrieves process flow information, compares it with predetermined rules, and generates check results, eliminating human errors while maintaining the ability to handle complex rule evaluations through systematic automated comparison.
3Productivity
If automated checking is implemented, then checking speed and accuracy improve, but system complexity increases
Solution Approach 1:
The patent segments the checking system into distinct functional modules: a retrieval unit for obtaining process flow information, a comparison unit for matching against predetermined rules, and a result generation unit for outputting check results. This segmentation allows the automated checking to be implemented in a structured manner that improves efficiency while managing system complexity through modular design.
Solution Approach 2:
The check processor is designed as a universal information processing unit that can handle multiple checking scenarios by retrieving different process flow information and comparing it against various predetermined rules. This multi-functionality allows the system to maintain high productivity across different checking tasks without proportionally increasing system complexity.
Data Source
AI summary
The process flow checking system includes a manufacturing route generator, a rule-information storage part, and a check processor. The manufacturing route generator generates manufacturing route information while associating additional information indicating, contents of respective processes in a semiconductor process flow with the respective processes. The rule-information storage part stores therein rule information in which a rule about an order of processes in the manufacturing route information is described by using expressions included in the additional information. The check processor checks appropriateness of the order of processes in the manufacturing route information by comparing the additional information of the manufacturing route information with the rule information.