Process Instrument Replacement in Semiconductor Processing Apparatus
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Solution Overview
Problem
The existing process of replacing process instruments in semiconductor manufacturing apparatuses, such as process cups, leads to decreased operation rates due to the need to stop the entire apparatus for maintenance, and requires manual intervention which can cause time delays and inefficiencies.
Innovation Solution
A method that allows for the replacement of process instruments like process cups while continuing processes in other units, by confirming the completion of a process in the designated unit, canceling the operation prohibition state for transfer means, and enabling load/unload operations in non-replacement units, thus maintaining continuous processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the interlock mechanism is activated to stop the entire operation when the cover door is opened for maintenance, then safety is improved, but the operation rate of the apparatus decreases
Solution Approach 1:
The apparatus is divided into multiple processing units (first coating unit, second coating unit) of the same type. When one unit undergoes maintenance with its cover door opened, the interlock mechanism stops only that specific unit while other units can continue operating independently, thus maintaining overall productivity while ensuring safety during maintenance operations.
2Reliability
If the process cup replacing operation is performed after all target objects are collected into a carrier, then safety is improved, but the apparatus operation rate decreases
Solution Approach 1:
The system monitors the process status and determines the appropriate timing for cover door opening based on whether the process in the processing unit is completed. By preliminarily assessing process completion status, the system allows cover door opening and maintenance operations at optimal times without requiring complete shutdown of all units, thus maintaining operation rate while ensuring safety.
3Ease of operation
If an operator manually closes the shutter by switching operation to set the interlock mechanism disabled, then ease of operation is improved, but time delay and inefficiency increase
Solution Approach 1:
The control system automatically monitors process completion status and determines when the cover door can be opened, eliminating the need for manual operator judgment and switching operations. The system self-manages the timing and coordination of maintenance operations, reducing time delays and improving efficiency while maintaining ease of operation through automated control.
Data Source
AI summary
Disclosed is a method for replacing a process instrument in a processing apparatus, in which a target object is loaded by a transfer mechanism into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer mechanism, canceling the operation prohibition state to allow the transfer mechanism to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.