Process I/O Controller with Real-Time OS for Semiconductor Jitter Reduction
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Solution Overview
Problem
Current semiconductor manufacturing control systems lack the ability to perform multiple functions with statistically repeatable responsiveness, leading to jitter and inefficiencies in command initiation and completion times, which are critical for precise process control.
Innovation Solution
The implementation of prioritized real-time operating systems in process I/O controllers that delegate data collection, monitoring, and control tasks from tool hosts to process I/O controllers, using multiple communication channels and protocols like MODBUS/TCP, to ensure deterministic and precise responses to sensor inputs and commands.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If current control systems are used to perform multiple functions (data collection, monitoring, control), then system versatility is improved, but response time repeatability deteriorates due to jitter
Solution Approach 1:
The system segments control functions by introducing a dedicated real-time controller that handles time-critical control tasks separately from the host system that performs data collection and monitoring. This segmentation isolates jitter-prone operations from precision control operations, allowing each to optimize for its specific function without compromising the other.
Solution Approach 2:
A real-time controller acts as an intermediary between the host system and the semiconductor manufacturing tool. This intermediary receives commands from the host, executes them with deterministic timing, and reports results back, thereby mediating between the non-real-time host operations and the real-time control requirements of the tool.
2Ease of operation
If standard operating systems are used in control systems, then ease of operation is improved, but response time precision deteriorates due to lack of deterministic scheduling
Solution Approach 1:
The control system is segmented into two parts: a standard operating system for the host system that provides ease of operation, and a real-time operating system for the controller that provides deterministic scheduling. This allows each part to use the OS best suited for its requirements without compromise.
Solution Approach 2:
The real-time controller serves as an intermediary that translates high-level commands from the standard OS host into precisely timed control actions. It maintains a command queue and uses deterministic scheduling to ensure precise response times while the host system continues to operate with standard OS convenience.
3Device complexity
If tool hosts directly control data collection and monitoring, then device complexity is reduced, but productivity deteriorates due to inefficiencies in command initiation and completion
Solution Approach 1:
The real-time controller acts as an intermediary that optimizes the control loop by handling time-critical operations efficiently. It maintains a command queue, pre-processes control actions, and executes them with minimal latency, thereby improving productivity without significantly increasing overall system complexity.
Solution Approach 2:
The controller performs preliminary actions by pre-loading and queuing control commands before they are needed. This allows the system to prepare control actions in advance, reducing command initiation delays and improving overall productivity of the control loop.
Data Source
AI summary
The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.