Process Kit Centerfinding for Accurate Robot End Effector Placement
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Solution Overview
Problem
Conventional manufacturing systems face challenges in accurately positioning process kits and carriers, leading to substrate damage and decreased efficiency due to shifting placements during transfer, which results in costly repairs and reduced yield.
Innovation Solution
The implementation of sensors at manufacturing system stations to detect the shape and center of process kits and carriers on an end effector, allowing for on-the-fly adjustments to the robot arm's process recipe to ensure precise target placement, thereby preventing dislodgment and equipment damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional positioning methods are used for process kits and carriers, then the system structure remains simple, but positioning accuracy deteriorates leading to substrate damage
Solution Approach 1:
The system performs centerfinding operations before the robot arm transfers the process kit to the processing chamber. Sensors detect the process kit's position and shape characteristics in advance, allowing the system to calculate and store correction values that will be applied during the transfer operation, preventing positioning errors before they occur
Solution Approach 2:
The system uses sensors to continuously monitor the process kit's position and orientation on the end effector. The detected position information is fed back to the controller, which calculates correction values and adjusts the robot arm's movement parameters to compensate for positioning deviations, ensuring accurate placement at the processing chamber
2Reliability
If no centerfinding is performed, then the operation process remains simple and fast, but substrate damage occurs due to inaccurate placement
Solution Approach 1:
The centerfinding operation is performed in advance during the robot arm's movement to the processing chamber, not as a separate step. The system detects the process kit's position and calculates corrections while the robot is already in transit, so the additional time required does not significantly impact the overall manufacturing cycle
Solution Approach 2:
The sensor detection and centerfinding calculations are performed continuously during the robot arm's transfer motion, rather than stopping the process to perform measurements. This allows the system to maintain continuous productive action while gathering necessary positioning data and applying corrections
3Object-affected harmful factors
If the process kit placement is not monitored, then the system operation remains simple, but the process kit may shift or dislodge causing equipment damage
Solution Approach 1:
Sensors mounted on the end effector continuously monitor the process kit's position and orientation during transfer. When deviations from the target position are detected, the system generates feedback signals to the robot arm controller, which adjusts the positioning in real-time to prevent the process kit from shifting or dislodging, protecting the processing chamber from damage
Solution Approach 2:
The system replaces complex mechanical positioning and locking mechanisms with sensor-based detection and software-controlled robot arm adjustments. This substitution reduces mechanical complexity while providing more precise and adaptable monitoring and correction capabilities to prevent equipment damage
Data Source
AI summary
One or more first signals are obtained. The first signals indicate a current shape of an object placed on an end effector. The one or more first signals are compared to one or more second signals that each indicate a predefined shape for a process component on the end effector. A determination is made of whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.