Process Kit Ring Carrier for Sealed Robotic Replacement
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Solution Overview
Problem
In semiconductor processing and other electronics processing, the manual replacement of process kit rings and other components in substrate processing systems leads to contamination, requalification processes, and significant disruptions in line yield, scheduling, and energy usage, as the processing chamber must be opened and resealed.
Innovation Solution
A substrate processing system carrier with a rigid body and removably attachable fingers, allowing for automated transportation and replacement of different types of content, such as new or used process kit rings, without opening the processing chamber, using robot arms and maintaining a sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual replacement of process kit rings is performed, then the processing chamber can be opened for component replacement, but contamination occurs and requalification processes are required
Solution Approach 1:
A carrier serves as an intermediary device between the external environment and the processing chamber. The carrier holds process kit rings and other components in a sealed state during transport, allowing robotic arms to transfer them without opening the chamber. This mediator prevents direct contact between external components and the controlled chamber environment, eliminating contamination risks.
Solution Approach 2:
The system segments the component replacement process into two independent parts: (1) component preparation and storage on the carrier outside the chamber, and (2) automated transfer and installation inside the chamber. This segmentation allows the chamber to remain sealed during component preparation while enabling automated replacement without manual intervention.
2Ease of operation
If the processing chamber is opened for manual replacement, then components can be replaced, but line yield and scheduling are disrupted
Solution Approach 1:
The system enables self-service automated replacement where robotic arms perform the entire component replacement process without human intervention. The carrier is loaded with components, the robotic arm autonomously transfers components from the carrier to the processing chamber, and installs them. This eliminates the need for chamber opening and manual operations that disrupt production scheduling and line yield.
Solution Approach 2:
Components are prepared and loaded onto the carrier in advance outside the processing chamber. This preliminary action allows all replacement components to be ready before the automated transfer begins, enabling rapid replacement without extending chamber open time or disrupting the production schedule.
3Ease of operation
If manual replacement is performed, then component replacement is possible, but energy usage increases due to chamber resealing
Solution Approach 1:
The sealed carrier acts as a portable controlled environment that travels with components. Since the carrier maintains its own seal, the processing chamber does not need to be opened or resealed during component replacement. This eliminates the energy-intensive vacuum breaking and reestablishment cycles that would otherwise occur with each manual replacement operation.
4Ease of manufacture
If a fixed carrier design is used, then manufacturing is simple, but adaptability to different content types is limited
Solution Approach 1:
The carrier employs dynamic, adjustable finger mechanisms that can change their configuration based on the type and size of content being transported. The fingers can be repositioned along the carrier body to accommodate different component dimensions, and their orientation can be adjusted to properly support various shapes. This dynamic adaptability allows a single carrier design to handle multiple content types without sacrificing manufacturing simplicity.
Solution Approach 2:
The carrier is designed as a universal platform with standardized mounting features and adjustable support elements that can accommodate process kit rings, substrates, and other components. The same carrier body and fastening mechanism serve multiple functions by simply reconfiguring the finger positions and orientations, eliminating the need for multiple specialized carrier designs.
Data Source
AI summary
A carrier includes a carrier body configured to be supported on a robot to transport one or more process kit rings within a substrate processing system. The carrier further includes fingers extending from the carrier body. The fingers are configured to support the one or more process kit rings. A first finger of the plurality of fingers includes an upper surface that forms a recess to receive the one or more process kit rings.