Process Kit Ring Enclosure for Contamination-Free Chamber Exchange

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Solution Overview

Problem

The conventional method of replacing process kit rings in processing chambers requires opening the chamber, leading to contamination and a lengthy requalification process, which negatively impacts line yield, scheduling, and quality.

Innovation Solution

A process kit enclosure system with a plurality of surfaces to enclose an interior volume, featuring first and second support structures with horizontal fins to hold process kit ring carriers and rings, enabling automated transfer of new and used rings without opening the processing chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If process kit rings are replaced by manually opening the processing chamber, then the process kit rings can be replaced, but the processing chamber becomes contaminated and requires lengthy requalification

Engineering Contradiction:

Improveprocess kit ring replacementVSAvoidchamber contamination

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The system divides the process kit ring replacement operation into separate functional modules: a process kit ring holder that stores multiple rings, an automated transfer mechanism, and a interface with the processing chamber. This segmentation allows replacement without manual chamber opening, preventing contamination while maintaining ease of operation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent introduces an intermediary process kit ring holder and transfer mechanism between the operator and the processing chamber. This intermediary system automates the replacement process, eliminating direct human access to the chamber and preventing contamination from cells, hair, and dust.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If process kit rings are replaced by manually opening the processing chamber, then the process kit rings can be replaced, but the requalification process removes the chamber from operation for days to weeks

Engineering Contradiction:

Improveprocess kit ring replacementVSAvoidrequalification time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The system performs preliminary actions by pre-storing multiple process kit rings in the holder and preparing the transfer mechanism in advance. This allows immediate replacement without chamber opening, eliminating the need for lengthy requalification processes and reducing downtime to minimal time for automated exchange.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent replaces manual mechanical operations with an automated transfer mechanism that uses robotic or automated positioning systems. This substitution eliminates the need for manual chamber opening and subsequent requalification, reducing operational time from days to weeks down to minutes.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If process kit rings are replaced manually, then the replacement can be performed, but line yield and scheduling are negatively impacted

Engineering Contradiction:

Improveprocess kit ring replacementVSAvoidline yield

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The system enables self-service operation where the automated transfer mechanism performs process kit ring replacement without human intervention. This maintains continuous production flow, preventing disruptions to line yield and scheduling while keeping the system easy to operate through automated functionality.

Inventive Principle:

Principle #25Self-service

4Ease of operation

If the processing chamber is opened for process kit ring replacement, then access is gained to replace rings, but cells, hair, dust and other contaminants enter the chamber

Engineering Contradiction:

Improveaccess to process kit ringVSAvoidcontaminant introduction

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent introduces an intermediary automated transfer system that acts as a barrier between the contaminated external environment and the clean processing chamber. This intermediary mechanism transfers process kit rings without requiring chamber opening, preventing introduction of cells, hair, dust, and other contaminants.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system replaces manual mechanical access with an automated transfer mechanism that maintains chamber integrity. This substitution eliminates the opening/closing cycle that introduces contaminants, ensuring the chamber remains sealed and contamination-free during process kit ring replacement.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS20250087524A1Process kit enclosure system

Publication Date: 2025.03.13 APPLIED MATERIALS INC

AI summary

A process kit enclosure system includes walls and a retention device structure. The retention device structure includes a retention device post and a retention device fin. The retention device fin in a first position is disposed above and secures a process kit ring supported in the interior volume of the process kit enclosure system. The retention device fin is rotated from the first position to be in a second position to be outside a boundary of the process kit ring. The retention device post is aligned with and inserts into a recess formed by a top cover of the process kit enclosure system responsive to the retention device post being in the first position. The retention device post is misaligned with and blocked from inserting into the recess formed by the top cover responsive to the retention device post of the retention device structure being in the second position.