Process Module Selection Rules for Substrate Processing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

In substrate processing apparatuses with multiple process modules, users face difficulty in efficiently selecting the appropriate module based on factors like cumulative film thickness and usage, requiring manual effort to determine the best module for processing.

Innovation Solution

A substrate processing system that includes an input unit for recipe information and a selection unit which automatically selects a process module based on user-designated selection rules, such as priority, cumulative film thickness, or usage history, reducing user effort and time in selecting the desired module.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual selection of process modules is performed by users, then flexibility in choosing processing parameters is maintained, but user effort and time consumption increase

Engineering Contradiction:

Improveuser effort in selecting process moduleVSAvoidtime for selecting process module

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The system enables automatic selection of process modules by the control device based on stored selection rules, eliminating the need for manual user intervention. The control device autonomously determines the appropriate process module by evaluating criteria such as cumulative film thickness and usage history, thereby reducing user effort and time consumption while maintaining operational flexibility

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Selection rules are pre-stored in the control device before actual processing begins. These rules contain predetermined criteria and logic for selecting process modules based on various parameters. By preparing the selection logic in advance, the system can quickly and automatically determine the appropriate process module without requiring users to manually evaluate multiple factors during operation

Inventive Principle:

Principle #10Preliminary action

2Measurement precision

If automatic selection based on multiple criteria is implemented, then selection accuracy and optimization improve, but system complexity increases

Engineering Contradiction:

Improveselection accuracy based on cumulative film thickness and usageVSAvoidcomplexity of selection rule system

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The selection system is divided into distinct functional components: a storage unit for maintaining selection rules, a control device for executing selection logic, and evaluation criteria such as cumulative film thickness tracking and usage history recording. This segmentation allows each component to handle specific aspects of the selection process independently, making the overall complex system manageable and maintainable while achieving accurate automated selection

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS20240393768A1Substrate processing apparatus, substrate processing method, and program

Publication Date: 2024.11.28 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus having a plurality of process modules for processing a processing target, includes an input unit that receives an input of recipe information indicating a processing for the processing target; and a selection unit that selects the process module for processing the processing target based on a selection rule designated by a user.