Process Kit Ring Wear Detection Without Chamber Venting
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Solution Overview
Problem
The existing methods for determining the end-of-life (EoL) of process kit rings in plasma processing chambers are labor-intensive and disrupt productivity, as they require venting the chamber and exposing it to the atmosphere, leading to contamination and lengthy requalification processes.
Innovation Solution
A method and system for in-situ monitoring of edge ring erosion using non-contact sensors that analyze sensor data to determine EoL thresholds, enabling automated replacement without venting the processing chamber, thereby maintaining continuous operation and preventing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the processing chamber is vented and disassembled to check edge ring wear, then the edge ring can be inspected and replaced, but productivity is lost and contamination occurs
Solution Approach 1:
The patent replaces mechanical disassembly and visual inspection with non-contact optical sensors (cameras) that capture images of the edge ring through the plasma window. Image processing algorithms automatically measure edge ring wear without requiring chamber venting or disassembly, thereby maintaining continuous processing operation and eliminating productivity loss.
Solution Approach 2:
The patent introduces an intermediary measurement system consisting of optical sensors and image processing software that acts as a mediator between the edge ring and the inspection process. This intermediary system enables wear measurement through the plasma window without direct physical access, avoiding the need to vent the chamber or disassemble components.
2Ease of repair
If the processing chamber is opened for edge ring replacement, then the edge ring can be replaced, but contamination of the chamber interior occurs
Solution Approach 1:
The patent replaces mechanical disassembly and manual replacement operations with automated robotic manipulation guided by optical sensing. The robot arm performs edge ring replacement through the plasma window opening without requiring full chamber disassembly, maintaining chamber integrity and preventing contamination from atmospheric exposure.
Solution Approach 2:
The patent introduces a robotic manipulation system as an intermediary that enables edge ring replacement through the sealed plasma window. This intermediary system allows component replacement without breaking the vacuum seal or exposing the chamber interior to atmosphere, thereby preventing contamination.
3Measurement precision
If conventional inspection methods are used, then edge ring wear can be detected, but labor intensive procedures are required
Solution Approach 1:
The patent replaces manual inspection operations with automated optical sensing and image processing systems. Cameras capture images of the edge ring and software algorithms automatically measure wear dimensions, eliminating the need for manual measurement tools and skilled operator intervention, thereby simplifying the inspection process.
Solution Approach 2:
The patent implements a self-service measurement system where the optical sensors and image processing algorithms automatically capture, analyze, and quantify edge ring wear without human intervention. The system performs self-calibration and self-measurement, eliminating the need for manual operation and reducing labor requirements.
Data Source
AI summary
A diagnostic disc includes a disc body having a sidewall around a circumference of the disc body and at least one protrusion extending outwardly from a top of the sidewall. A non-contact sensor is attached to an underside of each of the at least one protrusion. A printed circuit board (PCB) is positioned within an interior formed by the disc body. Circuitry is disposed on the PCB and coupled to each non-contact sensor, the circuitry including at least a wireless communication circuit, a memory, and a battery. A cover is positioned over the circuitry inside of the sidewall, where the cover seals the circuitry within the interior formed by the disc body from an environment outside of the disc body.