Process Shutter Positioning for Precise Vacuum Disc Alignment
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Solution Overview
Problem
Existing process shutter arrangements in vacuum equipment for semiconductor and optical industries are laborious to install and may compromise precision due to thermal expansion and the need for sophisticated multi-sensor systems.
Innovation Solution
A process shutter arrangement featuring a shutter disc with positioning mortises and a shutter arm with positioning tenons, allowing for precise positioning and high repeatability without the need for complex sensor systems, by utilizing mechanical provisions that enable light, dimensionally minimized components to be moved quickly and accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If additional installations like modified cover-rings are provided to prevent mutual movement, then the shutter disc can be secured, but the installation becomes laborious and placing precision may be influenced by thermal expansion
Solution Approach 1:
The positioning system is segmented into discrete mortises in the shutter disc and corresponding tenons on the bearing surface, allowing independent positioning elements that simplify assembly while maintaining security
Solution Approach 2:
The patent replaces complex mechanical securing systems (cover-rings, multiple fasteners) with a simplified mortise-tenon mechanical interlocking system that achieves the same securing function with fewer components and less labor
2Manufacturing precision
If sophisticated multi-sensor systems are used to center the shutter disc, then positioning precision can be improved, but the device complexity and installation labor increase
Solution Approach 1:
The shutter disc self-centers through the geometric constraint of three mortises arranged in an equilateral triangle pattern, which automatically align with three corresponding tenons on the bearing surface, eliminating the need for external sensor-based positioning systems
Solution Approach 2:
The patent extracts and eliminates the need for sophisticated sensor systems by implementing a pure mechanical self-centering solution through the mortise-tenon arrangement, removing unnecessary complexity while maintaining precision
3Strength
If robust construction with heavy components is used for the shutter disc and blade, then mechanical strength is improved, but the components cannot be moved as quickly and dimensionally minimized design is compromised
Solution Approach 1:
The shutter disc and blade are designed with local reinforcement only where needed for strength (at the mortise and tenon locations for mechanical interlocking) while maintaining minimal thickness and weight in the remaining areas, enabling fast movement without compromising structural integrity
Solution Approach 2:
The patent employs materials and structural designs that provide high strength-to-weight ratio, allowing the components to be both strong and lightweight for rapid acceleration and deceleration during positioning operations
Data Source
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AI summary
A process shutter arrangement for a vacuum process system is disclosed, the arrangement comprising: - a shutter disc (1) having an essentially circumferential outer diameter DDo, a thickness t, a first surface (2), and a second surface (3), the disc comprising at least three positioning mortises (4) in the first surface (2) near the outer diameter DDo, each mortise being centered with respect to a radially axis ξ1-3 in an xy-plane of the disc and having two long sides a positioned in parallel or right angled to the respective axis ξ1-3; - a shutter arm (10) comprising a bearing sickle (11) with an inner periphery DSi, and at least three positioning tenons near or adjacent to the inner diameter DSi, and corresponding with positioning mortises (4) to position the disc when set on the positioning tenons or on an optional bearing surface of the sickle.