Process Vessel Preheating With Thermal Gradient to Suppress Particles
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Solution Overview
Problem
The generation of particles in process vessels during substrate processing in semiconductor manufacturing is a challenge that existing technologies have not adequately addressed.
Innovation Solution
A technique involving pre-heating the process vessel with a predetermined thermal gradient without loading a substrate, followed by substrate processing, to prevent rapid temperature elevation and subsequent particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the process vessel is heated rapidly to improve processing efficiency, then the throughput is improved, but particles are generated in the process vessel
Solution Approach 1:
The patent applies preliminary action by performing a pre-heating process before the main substrate processing. The pre-heating step heats the process vessel to a predetermined temperature while maintaining a controlled thermal gradient, preparing the vessel in advance to prevent particle generation during subsequent high-temperature processing without compromising throughput
Solution Approach 2:
The patent applies parameter changes by controlling the thermal gradient during pre-heating. Specifically, the thermal gradient is maintained at 10°C/mm or less in the radial direction and 5°C/mm or less in the axial direction, which prevents excessive stress and particle generation while still achieving the necessary temperature elevation for efficient processing
2Loss of time
If the thermal gradient is increased to reduce pre-heating time, then the productivity is improved, but the temperature distribution becomes uneven causing particle generation
Solution Approach 1:
The patent optimizes the thermal gradient parameters to balance heating speed and temperature uniformity. By setting the radial thermal gradient at 10°C/mm or less and axial thermal gradient at 5°C/mm or less, the system achieves sufficient pre-heating speed while maintaining uniform temperature distribution that prevents particle generation
Solution Approach 2:
The patent implements feedback control by monitoring the thermal gradient during pre-heating and adjusting heating conditions to maintain the gradient within specified limits. This ensures consistent temperature distribution and prevents particle generation while minimizing pre-heating time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses particle generation in the process vessel, improves throughput, and maintains consistent temperature control by adjusting thermal gradients based on idling times.
Implementation Method 1
heating a process vessel with a predetermined thermal gradient without loading a process substrate in the process vessel
Data Source
AI summary
There is provided a technique that includes: (a) heating a process vessel with a predetermined thermal gradient without loading a process substrate in the process vessel; and (b) processing the process substrate after (a) with the process substrate loaded in the process vessel.