Inspecting Installation Environment Influence on Processing Apparatus
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Solution Overview
Problem
Existing methods for evaluating the influence of the installation environment on processing apparatuses, such as those used in chip manufacturing, are costly and require additional measuring instruments, making it difficult to assess the impact on processing accuracy without causing disruptions or requiring significant modifications to the apparatus.
Innovation Solution
An inspecting method that utilizes the existing imaging unit on the processing apparatus to set and image a mark, determining the relative positional change between the chuck table and processing unit, allowing for the evaluation of installation environment influence without the need for new measuring instruments by comparing image positions and setting a threshold for positional changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a laser measuring instrument is mounted on the processing apparatus to verify the relative positional relation between the chuck table and processing unit, then the influence of installation environment can be inspected, but the cost increases and mounting space may not be sufficient
Solution Approach 1:
The imaging unit, originally designed for imaging the workpiece during processing, is made to serve a dual function by also imaging the mark to verify the relative positional relation between the chuck table and processing unit. This eliminates the need for separate measuring instruments while maintaining the capability to inspect installation environment influence.
Solution Approach 2:
The processing apparatus uses its own existing imaging unit to perform the inspection function that would otherwise require external measuring instruments. The system inspects itself by utilizing resources already available within the apparatus, avoiding additional cost and complexity.
2Object-affected harmful factors
If vibration isolation fixture is used to prevent vibration propagation to the processing apparatus, then the influence of installation environment can be relaxed, but it is difficult to determine whether processing result variations are caused by insufficient vibration isolation or other causes
Solution Approach 1:
The imaging unit provides feedback information by imaging the mark at different positions and times. By detecting changes in the marked position relative to the processing unit, the system can determine whether processing result variations are caused by installation environment vibrations or other factors, enabling targeted corrective measures.
Solution Approach 2:
The mark serves as an intermediary object that mediates between the chuck table and the imaging unit. By observing the mark's position changes, the system can indirectly measure the relative positional relation between the chuck table and processing unit, providing information about vibration influence without direct measurement of vibrations themselves.
3Device complexity
If the imaging unit is used to image the mark for inspecting installation environment influence, then no additional measuring instrument is needed, but the mark must be clearly visible and positioned within the imaging range
Solution Approach 1:
The mark is set in advance on the chuck table or workpiece at a position that will be within the imaging range of the processing unit. This preliminary positioning ensures that the mark is clearly visible to the imaging unit without requiring complex adjustment mechanisms, facilitating easy operation while avoiding additional instruments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method provides an objective assessment of the installation environment's influence on processing accuracy, enabling targeted measures to be taken and identifying non-environmental causes of processing variations without additional instrumentation or space constraints.
Implementation Method 1
an imaging unit fixed to the processing unit to image the workpiece held on the chuck table
Data Source
AI summary
A method for inspecting the influence of an installation environment upon a processing apparatus includes setting a mark for specifying a relative positional relation between a chuck table and a processing unit, imaging the mark plural times by using an imaging unit when a moving unit is at rest, and detecting the position of the mark from an image and then determining whether or not the influence of the installation environment upon the processing apparatus is present based on whether the change in position of the mark is less than or more than a threshold.