Processing Fluid Monitoring Using Pattern Light Distortion
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Solution Overview
Problem
Existing substrate cleaning devices face challenges in monitoring minute changes in the fluid state of processing fluids due to their colorlessness and transparency, which are difficult to capture using conventional cameras.
Innovation Solution
A monitoring method that applies pattern light to the processing fluid and uses an event-based camera to capture images, evaluating the fluid state based on event data from pixels with changed luminance values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional cameras are used to capture processing fluid, then the system is simple, but the measurement precision of fluid state changes is insufficient
Solution Approach 1:
The patent introduces pattern light as an intermediary substance to enable detection of the processing fluid. The pattern light interacts with the fluid to create visible patterns that reveal fluid state changes, allowing conventional cameras to detect what would otherwise be invisible. This resolves the contradiction by adding a simple intermediary element rather than complex detection hardware.
Solution Approach 2:
The patent applies pattern light with specific wavelengths and patterns to the processing fluid, causing the fluid to reflect or refract light in a way that makes its state changes visible. The pattern light creates contrast variations that conventional cameras can detect, transforming the invisible fluid dynamics into visible optical patterns without requiring complex specialized sensors.
2Measurement precision
If high-speed cameras are used to capture fast-moving processing fluid, then the measurement precision improves, but the device complexity and cost increase
Solution Approach 1:
The patent uses pattern light that modulates at specific frequencies to interact with the high-speed processing fluid. This periodic lighting creates stroboscopic effects that freeze motion in the camera capture, allowing standard cameras to record high-speed fluid dynamics without requiring expensive high-frame-rate cameras. The periodic illumination synchronizes with the fluid motion to make it detectable.
Solution Approach 2:
Instead of using complex high-speed mechanical camera systems to capture fast fluid motion, the patent substitutes an optical field approach using pattern light. The light patterns encode motion information that can be captured by standard cameras through optical processing, replacing the need for mechanically complex high-speed imaging systems.
3Measurement precision
If the processing fluid is made more visible through additives, then the measurement precision improves, but the purity of the processing fluid decreases
Solution Approach 1:
The patent uses pattern light as a non-contact intermediary to visualize the processing fluid without adding any substances to it. The light patterns interact with the fluid's optical properties (refraction, reflection) to make it visible, eliminating the need to compromise fluid purity with dyes or tracers. This resolves the contradiction by providing visibility through optical interaction rather than chemical modification.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables detection of minute fluid state changes by imaging the pattern light's distortion, allowing high-speed motion capture and reducing processing complexity.
Implementation Method 1
capturing a reflected image of the pattern light reflected on the surface of the processing fluid
Implementation Method 2
capturing a projected image of the pattern light projected on the surface of the processing fluid
Implementation Method 3
the image of the processing fluid is captured by an event-based camera to acquire event data configured by information only about a pixel with a changed luminance value
Data Source
AI summary
An image of a processing fluid is captured while the processing fluid is supplied to a substrate W that is as an object to be processed. At this time, an irradiator applies pattern light having a light and dark pattern, and a camera captures a reflected image or projected image of the pattern light on the surface of the processing fluid. Then, the fluid state of the processing fluid is evaluated based on the result of image capture by the camera. Since the processing fluid is imaged together with the pattern light, it is possible to detect minute changes in the fluid state of the processing fluid in accordance with distortion of the pattern light.