Processing Liquid Circulation Layout for Clean, Stable Multi-Unit Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing processing liquid supply systems for semiconductor manufacturing face challenges in efficiently supplying and filtering processing liquids to multiple liquid processing units while maintaining cleanliness and controlling flow rates, especially when dealing with high viscosity liquids.
Innovation Solution
A processing liquid supply system with a circulation passage featuring two pump filter sets arranged in series, including a first pump filter set and a second pump filter set, and branching passage sections that supply processing liquid to multiple liquid processing units, allowing for precise control of flow rates and enhanced cleanliness through multi-stage filtration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single pump and filter system is used to supply processing liquid to multiple liquid processing units, then the device complexity is reduced, but the manufacturing precision and cleanliness of the processing liquid deteriorates
Solution Approach 1:
The system divides the single pump-filter function into multiple independent pump-filter sets (first pump-filter set and second pump-filter set). Each set independently supplies processing liquid to different liquid processing units, thereby maintaining high cleanliness without requiring a single complex centralized system.
Solution Approach 2:
Each pump-filter set is configured with specific filters (first filters and second filters) tailored to the requirements of the connected liquid processing units. This allows each local subsystem to optimize filtration according to its specific needs, achieving high overall cleanliness without a single complex centralized filtration system.
2Adaptability or versatility
If high viscosity processing liquid is supplied to multiple liquid processing units, then the versatility of the system is improved, but the flow rate control precision deteriorates
Solution Approach 1:
The system segments the flow control function by providing independent flow control devices for each liquid processing unit. This allows precise control of flow rates for high viscosity liquids to each unit individually, maintaining control precision while handling diverse viscosity requirements across multiple units.
Solution Approach 2:
The system employs dynamic flow control capabilities where each pump-filter set can independently adjust its flow rate according to the specific requirements of connected liquid processing units. This dynamic adjustment capability enables precise flow control for high viscosity liquids while maintaining versatility across different processing units.
3Manufacturing precision
If multiple pump filter sets are arranged in series in the circulation passage, then the cleanliness of processing liquid is improved, but the device complexity increases
Solution Approach 1:
The circulation passage is segmented into multiple independent pump-filter sets arranged in series. Each set contains its own pump and filters, creating modular units that can be systematically arranged. This segmentation achieves enhanced cleanliness through multi-stage filtration while keeping each module relatively simple and manageable.
Solution Approach 2:
The system merges multiple pump-filter sets into a coordinated series arrangement within the circulation passage. By combining these independent but functionally similar units in sequence, the system achieves cumulative filtration效果 (enhanced cleanliness) while maintaining the simplicity of individual modular units.
4Productivity
If processing liquid is supplied to multiple liquid processing units through branching passages, then the productivity of the system is improved, but the pressure control stability deteriorates
Solution Approach 1:
The system segments the pressure control function by providing independent flow control devices at each branch point leading to different liquid processing units. This segmentation allows each branch to maintain stable pressure independently, preventing pressure fluctuations from affecting other units while serving multiple processing units simultaneously.
Solution Approach 2:
Each branching passage is equipped with local flow control devices that can independently adjust and stabilize pressure for the connected liquid processing unit. This local pressure control capability ensures that each unit receives stable pressure despite the complexity of supplying multiple units, maintaining pressure stability while improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables precise control of flow rates and enhances the cleanliness of processing liquids, even with high viscosity, by utilizing magnetic levitation centrifugal pumps and multiple filters, reducing the risk of apparatus damage from pressure fluctuations.
Implementation Method 1
utilizing magnetic levitation centrifugal pumps
Implementation Method 2
magnetic levitation centrifugal pumps
Implementation Method 3
multiple filters arranged in series
Data Source
AI summary
A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liquid processing units that perform a liquid processing on a substrate, a first pump filter set that is a combination of a first pump and a plurality of first filters provided downstream of the first pump, and a second pump filter set that is a combination of a second pump and a plurality of second filters provided downstream of the second pump. The first pump filter set and the second pump filter set are arranged in series in the circulation passage such that the first pump filter set is located upstream of the second pump filter set.