Workpiece Processing Measurement with Vibration-Linked Reliability
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Solution Overview
Problem
Existing processing apparatuses face issues with inaccurate processed state information due to vibrations during high magnification imaging or precise measurements, leading to reduced productivity as re-imaging or remeasurement is necessary to ensure accuracy.
Innovation Solution
A processing apparatus that includes a holding unit, processing unit, moving mechanism, processed state measuring unit, and controller, which links and stores processed state information with vibration information to determine reliability and corrects data based on vibration levels, ensuring high accuracy without productivity loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If processed state information is acquired during operation, then productivity is maintained, but measurement precision deteriorates due to vibrations
Solution Approach 1:
The system acquires vibration information from vibration measuring means during processed state measurement, feeds back this vibration information to the controller, and uses it to determine whether the measured processed state information is reliable. This feedback mechanism enables real-time quality assessment without stopping production.
Solution Approach 2:
The system changes the parameter of reliability assessment by introducing vibration information as an additional parameter. The controller determines reliability based on the relationship between vibration information and processed state information, effectively using parameter correlation to resolve the contradiction between continuous operation and measurement accuracy.
2Measurement precision
If re-imaging or remeasurement is performed to ensure accuracy, then measurement precision is improved, but productivity decreases due to stopped operation
Solution Approach 1:
The vibration measuring means continuously monitors vibration levels and provides feedback to the controller. This enables the system to assess measurement reliability in real-time without requiring repeated measurements or stopping operation, thus maintaining both accuracy and productivity.
Solution Approach 2:
The system performs self-assessment of measurement quality by using its own vibration information to determine the reliability of its measured processed state information. This eliminates the need for external verification through repeated measurements.
3Measurement precision
If high magnification imaging or high accuracy measurement is performed, then measurement precision is improved, but vibration sensitivity increases causing reliability to deteriorate
Solution Approach 1:
The controller acquires vibration information from vibration measuring means and uses this feedback to assess whether high magnification imaging or high accuracy measurement results are reliable. The vibration information serves as a indicator of measurement quality under different operating conditions.
Solution Approach 2:
The system introduces vibration information as a new parameter that correlates with measurement reliability. By analyzing the relationship between vibration parameters and measurement results, the system can determine reliability without compromising measurement precision.
Data Source
AI summary
A processing apparatus includes a holding unit for holding a workpiece thereon, a processing unit for processing the workpiece held on the holding unit, a moving mechanism for moving the holding unit and the processing unit relatively to each other, a processed state measuring unit for measuring a processed state of the workpiece, and a controller for controlling the processing unit, the moving mechanism, and the processed state measuring unit. The controller acquires processed state information of the workpiece from the processed state measuring unit, acquires vibration information regarding vibrations that are being produced while the processed state information is acquired, links the processed state information and the vibration information that have been acquired with each other, and stores the processed state information and the vibration information that have been linked with each other.