Processing Liquid Nozzle Ultrasonic Wave Generator Segmentation
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Solution Overview
Problem
The oscillating body in processing liquid nozzles that apply ultrasonic waves to cleaning liquids is prone to damage due to the impact force from bursting bubbles, especially when effervescent liquids are used.
Innovation Solution
A processing liquid nozzle design incorporating an ultrasonic wave generator, a first supply flow path for a chemically resistant liquid, and a second supply flow path for an effervescent liquid, where the effervescent liquid is supplied downstream of the ultrasonic wave generator, reducing the impact on the oscillating body and minimizing liquid expansion and dripping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If effervescent liquid is supplied to the ultrasonic wave generator, then cleaning capability is improved, but the oscillating body is damaged by bubble bursting impact
Solution Approach 1:
The liquid supply is divided into two separate flow paths: a first supply flow path that provides a chemically resistant liquid to protect the oscillating body, and a second supply flow path that provides the effervescent liquid for cleaning. This segmentation allows each liquid to serve its specific function without causing damage.
Solution Approach 2:
The chemically resistant liquid is supplied in advance to the oscillating body before the effervescent liquid is introduced. This preliminary action creates a protective layer or environment that prevents damage from subsequent bubble bursting when the effervescent liquid is applied.
2Productivity
If effervescent liquid is supplied upstream of the ultrasonic wave generator, then cleaning capability is improved, but liquid expansion causes dripping
Solution Approach 1:
The liquid supply system is segmented into two separate flow paths with distinct functions. The second supply flow path introduces the effervescent liquid downstream, separating the expansion zone from the ultrasonic wave generator to prevent dripping while maintaining cleaning effectiveness.
Solution Approach 2:
The second supply flow path is positioned downstream in the flow direction, changing the spatial dimension of liquid introduction. This dimensional adjustment ensures that effervescent liquid expansion occurs away from the ultrasonic wave generator, preventing the harmful dripping effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses damage to the oscillating body and ensures efficient cleaning of substrates by minimizing the impact of ultrasonic waves and bubble bursting, while maintaining high cleaning capability even for films with high chemical stability.
Implementation Method 1
an oscillator that generates ultrasonic waves and an oscillating body that is connected to the oscillator
Implementation Method 2
the impact force from bursting bubbles
Data Source
AI summary
A processing liquid nozzle includes: an ultrasonic wave generator including a oscillator that generates ultrasonic waves and a oscillating body that is joined to the oscillator; a first supply flow path configured to supply a first liquid to a position in contact with the oscillating body of the ultrasonic wave generator; an ejection flow path configured to supply the first liquid to which the ultrasonic waves are applied by the ultrasonic wave generator to an ejection port; and a second supply flow path connected to the ejection flow path on a downstream side from the ultrasonic wave generator and configured to supply a second liquid to the ejection flow path.