Processing Pad Groove Edges for Bevel Portion Contact

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing processing apparatuses are inadequate in effectively processing the bevel portion of workpieces with a bevel portion at their outer circumferential edge.

Innovation Solution

A processing apparatus with a workpiece table and processing head, featuring a processing pad with inner and outer circumferential groove walls that rotate and swing to contact the bevel portion, allowing for effective processing by adjusting the contact range and orientation during the process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional processing pad is used without grooves, then the structure is simple, but the bevel portion of the workpiece cannot be effectively processed

Engineering Contradiction:
Improveprocessing effectiveness of bevel portionVSAvoidpad structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The processing pad is segmented by forming grooves that divide the pad surface into multiple functional regions. The grooves create inner and outer circumferential groove walls with edges that specifically contact the bevel portion, separating the bevel processing function from the flat surface processing function, thereby enabling effective bevel processing without complicating the entire pad structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The grooves are strategically positioned and dimensioned so that the inner and outer circumferential groove walls with their edges provide localized contact with the bevel portion. This local structural feature concentrates the processing action on the bevel area, improving processing effectiveness without requiring the entire pad to be complex

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If the processing pad contacts the workpiece with a flat surface, then the contact area is large, but the bevel portion cannot be effectively processed

Engineering Contradiction:
Improvebevel portion processing effectivenessVSAvoidpad surface area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The grooves extract material from the pad surface, creating three-dimensional groove walls with edges. These extracted edges are specifically designed to contact and process the bevel portion, separating the bevel processing function from the general flat surface contact, thereby enabling effective bevel processing without requiring the entire pad surface to be complex

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If the processing apparatus does not include a swing mechanism, then the structure is simple, but the processing range and contact precision are limited

Engineering Contradiction:
Improvecontact precision with bevel portionVSAvoidapparatus structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The swing mechanism introduces dynamic adjustability to the processing apparatus, allowing the processing pad to be swung between a first position for processing the flat surface and a second position for processing the bevel portion. This dynamic positioning enables precise contact with the bevel portion while maintaining overall apparatus simplicity through a single swingable component

Inventive Principle:
Principle #15Dynamics

4Adaptability or versatility

If the processing pad has a fixed contact position, then the structure is simple, but the processing range cannot be adjusted

Engineering Contradiction:
Improveprocessing range adjustabilityVSAvoidposition adjustment mechanism
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The swing mechanism provides dynamic adjustability by allowing the processing pad to be positioned at different angles - a first position for flat surface processing and a second position for bevel processing. This single dynamic component enables adjustment of the processing range without requiring complex multi-component position adjustment mechanisms

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS20240217050A1Processing apparatus
Publication Date: 2024.07.04 EBARA CORP
  • US20240217050A1 patent drawing
  • US20240217050A1 patent drawing
  • US20240217050A1 patent drawing

AI summary

Provided is a technique allowing an effective process of a bevel portion of a workpiece. A processing apparatus 1 includes a workpiece table 10 configured to hold a workpiece Wf, and a processing head 30 configured to hold a processing pad Pd. The processing pad includes a pad surface 120 provided with at least one groove 130 having an inner circumferential groove wall 131 and an outer circumferential groove wall 132. The processing apparatus 1 is configured to rotate the workpiece table and the processing head, and bring an edge 133 of the inner circumferential groove wall and an edge 134 of the outer circumferential groove wall in contact with a bevel portion 100 of the workpiece during a process of the workpiece.