Processing Port Actuator for Die Vessel Handling
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Solution Overview
Problem
Modern manufacturing processes, particularly in semiconductor production, rely heavily on human expertise for quality control and maintenance due to the complexity of manipulating materials and devices, which can lead to inefficiencies and potential damage from robotic interference.
Innovation Solution
A processing port system equipped with a robotic arm and an actuator system, such as a push bar or conveyor belt, to safely move die vessels between internal and external processing ports, allowing human operators or automated systems to handle die vessels without interference from semiconductor processing tools or robotic arms, while using force sensors to detect movement errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If human operators are used for quality control and maintenance, then expertise and knowledge are applied, but efficiency and productivity are reduced
Solution Approach 1:
An automated processing port system acts as an intermediary between human operators and semiconductor processing tools. The system includes a robotic arm for moving die vessels, an actuator system with push bars or conveyor belts for precise positioning, and force sensors for monitoring. This intermediary automation handles repetitive handling tasks while human operators focus on higher-level quality control decisions, resolving the contradiction between automation efficiency and human expertise utilization.
2Productivity
If robotic arms are used for moving die vessels, then productivity is improved, but risk of damage from robotic interference increases
Solution Approach 1:
Force sensors are integrated into the actuator system to provide real-time feedback on contact forces during die vessel handling. The sensors detect abnormal forces that may indicate potential damage and trigger corrective actions. This feedback mechanism allows the robotic system to operate with higher productivity while maintaining safety margins to prevent damage to die vessels.
Solution Approach 2:
The actuator system is designed with controlled motion profiles and force limits that prevent excessive forces from being applied to die vessels. The system incorporates soft stopping mechanisms and force thresholds that act as preventive measures before damage can occur, cushioning against potential harmful effects of robotic interference.
3Manufacturing precision
If automated actuator systems are used to move die vessels, then precision and safety are improved, but device complexity increases
Solution Approach 1:
The automated processing port system is segmented into distinct functional modules: a robotic arm for gross movement, an actuator system with push bars or conveyor belts for precise positioning, and force sensors for monitoring. This segmentation allows each component to be optimized independently for its specific function while maintaining overall system precision without excessive complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances safety and efficiency by reducing the risk of damage to die vessels during handling, enabling precise movement and error detection, thus improving the quality control and maintenance processes in semiconductor manufacturing.
Implementation Method 1
using force sensors to detect movement errors
Data Source
AI summary
In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.