Processing System Duct Segmentation for Prompt Piping
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Solution Overview
Problem
Conventional processing systems require complex and lengthy piping operations due to the need for ducts to be arranged and fixed externally during assembly, leading to inefficient and time-consuming installation processes.
Innovation Solution
A processing system design that includes a cradle for supporting feeding or discharging devices adjacent to the chamber, with pre-fixed chamber-side and cradle-side ducts, allowing for efficient connection and elimination of gauging requirements during assembly, enabling quicker and more efficient piping operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the duct is provided by gauging after arranging chambers in the processing plant, then the duct can be connected to the feeding device on the floor surface, but the piping becomes complex and the duct length is extended
Solution Approach 1:
The chamber-side duct is pre-fixed to the upper portion of the chamber in the manufacturing plant before transportation. This preliminary action eliminates the need for complex on-site gauging and framing operations, reducing piping complexity while maintaining installation flexibility
Solution Approach 2:
The duct system is divided into two separate segments: the chamber-side duct fixed to the chamber and the cradle-side duct fixed to the cradle. This segmentation allows each duct to be independently prepared and transported, simplifying the overall piping structure and reducing the need for complex connections at the installation site
2Reliability
If the duct is provided by gauging with frame fixation in the processing plant, then the duct can be securely fixed, but the assembly period is extended to several months
Solution Approach 1:
The chamber-side duct is pre-fixed to the chamber in the manufacturing plant with proper fixation structures before transportation. This preliminary fixation ensures structural reliability is established early, eliminating the need for time-consuming on-site frame installation and reducing the overall assembly period
Solution Approach 2:
The complex frame fixation operation is extracted from the on-site assembly process and performed in advance during manufacturing. This separates the critical fixation operation from the time-sensitive installation phase, ensuring reliability without extending the assembly period
3Ease of operation
If the feeding device is arranged on the floor surface and the duct is provided from the floor to the upper portion of the chamber, then the feeding device can be easily positioned, but the duct length is extended and piping becomes complex
Solution Approach 1:
The cradle supporting the feeding device is positioned at a height aligned with the chamber ceiling, changing the vertical dimension of the feeding device location. This allows the cradle-side duct to connect horizontally from the cradle to the chamber-side duct, significantly reducing the overall duct length compared to a vertical connection from the floor
Data Source
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AI summary
A prompt piping operation during assembling is enabled. The present invention relates to a processing device in which a cradle 7A configured to be transportable in a separate manner from a chamber CB is provided in a position adjacent to the chamber CB accommodating a processing device in an inner portion thereof, and discharging device (exhaust device 3) is provided on the cradle 7A. An exhaust duct 14 includes a chamber-side duct 14a fixed to a unit base 4 provided in an upper portion of the chamber CB and provided in a state in which one end is communicatively connected to the inner portion of the chamber CB and the other end is oriented toward the cradle 7A, and a cradle-side duct 14b fixed to the cradle 7A and provided in a state in which one end is connected to the exhaust device 3 via a manifold 13 and the other end is oriented toward the chamber. It is configured such that, at the time of assembly in a processing plant, the other end of the chamber-side duct 14a and the other end of the cradle-side duct 14b are communicatively connected.