Processing Tank Monitoring Through Liquid Surface Wave Smoothing
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Solution Overview
Problem
Existing substrate processing apparatuses struggle to accurately monitor the interior of a processing tank due to visually indistinguishable states caused by surface reflections and wave formations on the processing liquid, leading to insufficient monitoring accuracy.
Innovation Solution
A substrate processing apparatus equipped with a camera positioned vertically above the processing tank generates multiple images, smoothes the brightness distribution of the liquid surface waves through image integration, and uses a controller to monitor the tank interior based on smoothed image data, with optional reference image comparison for abnormality detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera captures images of the processing tank interior through the processing liquid surface, then monitoring capability is provided, but the captured images become obscure due to surface reflection and wave formation
Solution Approach 1:
The system captures images at periodic intervals and uses temporal integration to smooth out the periodic brightness fluctuations caused by liquid surface waves. By accumulating multiple frames over time, the random wave patterns average out, revealing the underlying tank interior structure and any abnormalities.
Solution Approach 2:
Multiple captured images are merged through temporal integration and spatial processing to create a single smoothed image. This combining process integrates information from multiple time points, canceling out the transient surface wave effects while preserving the permanent features of the tank interior.
2Measurement precision
If images are captured frequently to capture enough data for smoothing, then monitoring accuracy improves, but the frame rate increases device complexity and processing load
Solution Approach 1:
The system uses the natural temporal variation of the liquid surface waves to its advantage. The waves naturally provide the temporal diversity needed for smoothing, so the system doesn't need complex active disturbance mechanisms. The random natural motion of the liquid surface serves the purpose of providing multiple distinct image frames for integration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the clarity and accuracy of monitoring the processing tank interior, allowing for precise detection of abnormalities such as substrate pieces, thereby improving processing control.
Implementation Method 1
the state in the processing liquid is made visually indistinguishable by the surface reflection of the processing liquid
Implementation Method 2
generate smoothed image data obtained by smoothing a brightness distribution of waving caused on a liquid surface of the processing liquid based on integration of the plurality of items of captured image data
Data Source
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AI summary
A substrate processing apparatus collectively processes a plurality of substrates with the plurality of substrates immersing in a processing liquid. The substrate processing apparatus includes a processing tank, a camera, and a controller. The processing tank stores the processing liquid. The camera is provided vertically higher above the processing tank and captures the inside of the processing tank to generate a plurality of items of captured image data. The controller generates smoothed image data obtained by smoothing a brightness distribution of waving caused on a liquid surface of the processing liquid based on integration of the plurality of items of captured image data, and monitors the inside of the processing tank based on the smoothed image data.