Production Index Device Automates Semiconductor Capability Analysis
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Solution Overview
Problem
In semiconductor production, manually inputting indices specifying production device capabilities is time-consuming and effort-intensive, requiring an automated method to obtain production device capabilities efficiently.
Innovation Solution
A production index information generating device that extracts log information from production devices to calculate production capabilities, using linear regression analysis to generate production index information, thereby automating the process of determining device capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual input method is used to obtain production device capability indices, then accuracy of data input can be ensured, but time consumption and operational effort increase significantly
Solution Approach 1:
The production device automatically generates and outputs its own capability indices through log analysis without requiring manual data entry. The device performs self-measurement and self-reporting of its operational parameters, eliminating the need for operator intervention while maintaining data accuracy.
Solution Approach 2:
The patent replaces the manual mechanical data entry process with an automated information processing system. Log analysis software automatically extracts, processes, and generates capability indices from device logs, substituting human operators with computational algorithms that perform the measurement and data generation functions.
2Measurement precision
If manual input method is used to obtain production device capability indices, then data accuracy can be maintained, but operational effort and complexity increase
Solution Approach 1:
The production device autonomously generates its capability indices by analyzing its own operational logs. The system performs self-assessment of its performance parameters without requiring external manual input, thereby maintaining data accuracy while eliminating operational effort.
Solution Approach 2:
Instead of manually creating capability indices, the system automatically copies and processes existing log data from the production device to generate the indices. This copying approach preserves the original data accuracy while removing the need for manual data creation efforts.
3Loss of time
If automated log analysis is implemented to obtain production device capability indices, then time consumption is reduced, but system complexity increases
Solution Approach 1:
The patent introduces a log analysis module as an intermediary between the production device and the production planning system. This intermediary automatically processes device logs and generates capability indices, reducing time consumption while containing system complexity within a dedicated functional component rather than distributing it throughout the entire system.
Solution Approach 2:
The capability index generation function is extracted as a separate, dedicated log analysis module. By isolating this function, the system manages complexity through modular design, where the automated time-saving mechanism is contained in a specific component rather than being embedded throughout the entire production planning system.
Data Source
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AI summary
A control unit (120) of a production index information generating device (100) groups, based on log information of a production device, processing targets to generate groups for which end time of processing falls within a predetermined interval, classifies the processing targets contained in the groups into classes based on a number of the processing targets contained in each of the groups, generates cycle time information for each of the classes, which specifies cycle time of each of the processing targets contained in corresponding one of the classes, and determines a production capability of the production device. Accordingly, an index specifying a capability of the production device may be obtained with ease.