Production Line Module Scheduling for Shortest Queue Execution

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Solution Overview

Problem

Current scheduling algorithms for semiconductor production lines are inefficient and lack mature polynomial algorithms or optimization theories, making it difficult to optimize complex scheduling tasks and increase production capacity.

Innovation Solution

A method that divides production line apparatuses into functional modules, identifies tasks with the shortest queuing time, and executes them first, while managing task sequences and module states to minimize overall queuing time and optimize scheduling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional scheduling algorithms are used for semiconductor production lines, then the scheduling process can be implemented, but the scheduling efficiency and production capacity are insufficient due to the complex NP combinatorial optimization nature of the problem

Engineering Contradiction:
Improveproduction capacityVSAvoidscheduling algorithm complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent segments the complex scheduling problem into multiple discrete task sequences, each associated with specific apparatuses or functional modules on the production line. By dividing the overall scheduling task into smaller, manageable task sequences, the system can process and optimize each segment independently, transforming the intractable NP combinatorial optimization problem into a series of simpler scheduling decisions that can be executed efficiently.

Inventive Principle:
Principle #1Segmentation

2Productivity

If multiple transmission platforms and process chambers are used simultaneously to meet production requirements, then production capacity increases, but the wafer transmission paths and scheduling methods become complicated

Engineering Contradiction:
Improveproduction capacityVSAvoidwafer transmission path complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-defining task sequences for each apparatus or functional module before actual production scheduling. These task sequences outline the required operations and dependencies in advance, allowing the scheduling system to make deterministic decisions based on pre-established rules rather than solving complex optimization problems in real-time. This approach simplifies the management of multiple transmission platforms and process chambers by having predetermined pathways for wafer flow.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11990355B2Method and system for scheduling apparatuses on production line
Publication Date: 2024.05.21 BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
  • US11990355B2 patent drawing
  • US11990355B2 patent drawing

AI summary

A method and a system for scheduling apparatuses in a production line are disclosed. Each of the apparatuses on the production line includes one or more functional modules, each of the functional modules have a task sequence, and a task sequence includes one or more tasks. The method includes: obtaining a queuing time required for executing each of the tasks in the task sequence of the functional module; identifying a task that has a shortest queuing time in the task sequence as a target task; executing the target task; removing the target task from the task sequence and obtaining an updated queuing time required for executing each of the tasks in the task sequence. The method divides the apparatuses on the production line apparatus into a plurality of independent functional modules and executes the task having the shortest queuing time first with respect to each of the functional modules. It can be guaranteed to minimize an overall queuing time for each of the functional modules of the apparatuses on the production line during the scheduling process. Therefore, the scheduling efficiency can be increased.