Profiled DFBS Spring Structure for Linear Rotation Rate Sensing
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Solution Overview
Problem
Rotation rate sensors with double-folded beam suspension (DFBS) spring systems exhibit significant deviations from linear restoring force, affecting sensor behavior and leading to interference from parasitic modes.
Innovation Solution
The use of profiled portions in spring components, such as U-springs, with varying cross-sectional surfaces along their length to reduce mechanical nonlinearity, allowing for the independent shifting of parasitic mode frequencies without altering the sensor core, thereby improving sensor behavior and reducing parasitic mode influence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If double-folded beam suspension (DFBS) spring systems are used in rotation rate sensors, then the sensor structure is established with folded beam design, but significant deviations from linear restoring force occur affecting sensor behavior
Solution Approach 1:
The patent applies local quality by varying the cross-sectional dimensions (width and/or height) of the spring components at different locations along their length. This profiling creates non-uniform stiffness distribution that compensates for the inherent nonlinearity of folded beam structures, achieving more linear restoring force characteristics while maintaining the DFBS configuration.
Solution Approach 2:
The patent changes geometric parameters of the spring components by introducing profiled sections with varying cross-sectional areas. This parameter variation along the beam length modifies the stiffness distribution to reduce mechanical nonlinearity in the drive oscillation, directly addressing the linear restoring force deviation issue.
2Device complexity
If standard spring systems are used in rotation rate sensors, then the structure is simple, but mechanical nonlinearity of drive oscillation occurs reducing sensor performance
Solution Approach 1:
The invention introduces profiled portions with varying cross-sectional surfaces at specific locations within the spring system while keeping the overall DFBS structure intact. This localized modification reduces mechanical nonlinearity without fundamentally changing the device architecture, thus maintaining simplicity while improving reliability.
3Manufacturing precision
If the base area of spring portions is varied to reduce nonlinearity, then sensor behavior improves, but the frequency of drive oscillation may change
Solution Approach 1:
The patent carefully designs the profiling of spring portions to achieve nonlinearity reduction while maintaining drive oscillation frequency. By strategically varying cross-sectional dimensions at specific locations rather than uniformly, the invention compensates for nonlinearity effects without significantly altering the overall stiffness and natural frequency of the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces nonlinearity in drive oscillations by up to 45%, enhancing the excitability and feedback of useful modes while minimizing the impact of parasitic modes, leading to improved sensor performance.
Implementation Method 1
spring systems/spring structures designed having folded beams tend to have lower tensile stress than simple beams, at the same stiffness
Data Source
AI summary
A rotation rate sensor includes a substrate and a drive structure that is movable relative to the substrate and is fastened to the substrate via a spring system that includes first and second spring components that each connects the drive structure and the substrate and that are joined by an intermediate piece, the drive structure being joined to the intermediate piece via the first portion, and the intermediate piece or a center area, which is at least partially situated between the first and second portions, being joined to the substrate via the second portion, the first and/or second portions having a respective varying base area in a respective main extension direction of the first and second portions, respectively.