Programmable Test Substrate for Versatile Device Under Test Evaluation
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Solution Overview
Problem
Existing test apparatuses require additional or replacement test circuits for different testing functions, limiting their versatility and necessitating separate apparatuses for various device under test configurations.
Innovation Solution
A test apparatus with a programmable device and input/output circuits on a test substrate that can be electrically connected to multiple devices under test, allowing for programmable logic changes and flexible signal generation and judgment based on program data, enabling testing of multiple devices with a single apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If test circuits are added or replaced to test different device under test functions, then testing capability is improved, but device complexity increases
Solution Approach 1:
The patent implements a universal test apparatus where a single test substrate can test multiple types of devices under test by changing the test pattern stored in memory, rather than requiring separate test circuits for each device type. This multi-functionality approach allows the same hardware to adapt to different testing requirements through software/configuration changes.
Solution Approach 2:
The test apparatus uses a dynamic configuration system where the test pattern can be changed according to the type of device under test. The control unit dynamically loads different test patterns from memory based on the device being tested, allowing the test substrate to adapt its testing behavior without physical reconfiguration.
2Adaptability or versatility
If multiple test apparatuses are used for different device under test configurations, then testing versatility is improved, but manufacturing cost increases
Solution Approach 1:
The patent creates a single universal test apparatus that can replace multiple specialized test apparatuses. By storing different test patterns in memory and selectively loading them based on the device under test, the system achieves the functionality of multiple apparatuses within one unit, thereby reducing manufacturing costs and inventory requirements.
Solution Approach 2:
Instead of manufacturing multiple physical test apparatuses, the patent uses software-based test patterns that can be copied and stored in memory. These virtual test patterns replicate the functionality of different test apparatuses without requiring physical duplication, significantly reducing manufacturing and operational costs.
3Measurement precision
If test circuits are replaced for different device types, then testing accuracy is maintained, but loss of time increases
Solution Approach 1:
The test apparatus dynamically switches between different test patterns stored in memory based on the device under test. This dynamic reconfiguration allows the system to maintain testing accuracy for different device types without the time-consuming physical replacement of test circuits, as the change is performed electronically through memory access.
Solution Approach 2:
The patent pre-stores multiple test patterns in memory before actual testing begins. This preliminary preparation allows the system to quickly switch between different test patterns without needing to physically replace circuits, thereby maintaining accuracy while minimizing time loss during device type changes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and versatile testing of multiple devices under test with a single apparatus, reducing manufacturing costs and time by allowing real-time configuration changes and accurate signal transmission without the need for additional test circuits.
Implementation Method 1
forming, on the test substrate using photolithography, a programmable device that generates a digital test signal corresponding to program data supplied thereto; forming, on the test substrate using photolithography, a test circuit that generates an analog test signal
Implementation Method 2
forming, on the test substrate using electron beam lithography, at least a portion of wires that connect the programmable device and the input/output circuits and wires that connect the test circuit and the input/output circuits
Data Source
AI summary
A test apparatus that tests a plurality of devices under test formed on a wafer under test includes a test substrate that faces the wafer under test and is electrically connected to the devices under test, a programmable device that is provided on the test substrate and changes a logic relationship of output logic data with respect to input logic data, according to program data supplied thereto, a plurality of input/output circuits that are provided on the test substrate to correspond to the devices under test and that each supply the corresponding device under test with a test signal corresponding to the output logic data of the programmable device, and a judging section that judges pass/fail of each device under test, based on operation results of each device under test according to the test signal.