Projection Exposure Connecting Element Decoupling Rotational Stiffness
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Solution Overview
Problem
Existing connecting elements in projection exposure apparatuses for semiconductor lithography have excessive static and dynamic stiffness, leading to unstable control and mechanical vibrations, and alternative materials like plastic tubes tend to outgas or offer inadequate protection against bend radius limitations, making them unsuitable for advanced systems.
Innovation Solution
A connecting element with mechanical decoupling elements that decouple in all three rotational degrees of freedom, utilizing angled partial elements and additional mass to reduce stiffness and incorporate dampers for energy dissipation, ensuring effective shielding and optimized decoupling properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional connecting elements (corrugated tubes) are used, then mechanical protection is sufficient, but static and dynamic stiffness are too great causing unstable control
Solution Approach 1:
The connecting element is divided into multiple sections with different stiffness characteristics. The first section has higher stiffness for mechanical protection, while the second section has lower stiffness for controllability, achieving segmentation of functions within the single connecting element structure.
Solution Approach 2:
Different sections of the connecting element have different local properties: the first section is designed with higher static and dynamic stiffness for protection, while the second section has lower stiffness for control stability. This local differentiation resolves the contradiction between protection and controllability.
2Ease of operation
If plastic tubes are used to reduce stiffness, then controllability improves, but outgassing increases and bend radius protection is insufficient
Solution Approach 1:
The connecting element uses composite construction with a first section made of material providing mechanical protection (resisting outgassing and damage) and a second section made of material with lower stiffness (reducing controllability issues). This composite approach combines the benefits of both material types while avoiding their individual drawbacks.
3Object-affected harmful factors
If connecting elements maximize decoupling to reduce vibrations, then mechanical protection decreases, but vibration transmission is reduced
Solution Approach 1:
The connecting element is segmented into a first section with higher stiffness for mechanical protection and a second section with lower stiffness for vibration decoupling. This segmentation allows the structure to provide both protection and vibration reduction simultaneously.
Solution Approach 2:
Different sections have different local stiffness properties: the first section maintains high stiffness for protection while the second section has low stiffness for vibration isolation. This local quality differentiation enables simultaneous achievement of protection and vibration reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves improved mechanical decoupling and reduced transmission of mechanical excitations, enhancing the controllability and stability of components in projection exposure apparatuses while maintaining protection against mechanical damage and vacuum conditions.
Implementation Method 1
a connecting element for connecting two components (10, 20) of the projection exposure apparatus and at least one mechanical decoupling element (33), wherein the connecting element comprises at least two mechanical decoupling elements (33), which each decouple in two mutually orthogonal rotational degrees of freedom, wherein overall a decoupling in all three rotational degrees of freedom is achieved by the at least two decoupling elements (33)
Implementation Method 2
The forces that are exerted as a result by the connecting element over a frequency range, and thus the movements, influence the controllability of the component to be positioned and can result in unstable control
Data Source
AI summary
A projection exposure apparatus for semiconductor lithography comprises a connecting element for connecting two components of the projection exposure apparatus. The connecting element comprises at least two mechanical decoupling elements, which each decouple in two mutually orthogonal rotational degrees of freedom. Overall a decoupling in all three rotational degrees of freedom is achieved by the at least two decoupling elements.