Projection System Flexible Coupling Vibration Damping
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Solution Overview
Problem
Existing projection systems face challenges in reducing the influence of residual vibrations on the accuracy of beam projection in applications like lithography and microscopy, leading to complexity and increased costs due to the need for complex constructions and communication between subsystems.
Innovation Solution
A projection system with a flexible or slack coupling between the projection module and the frame to dampen vibrations, combined with a target positioning module that compensates for residual vibrations using a measurement system and controller, allowing movement of the projection module relative to the target positioning module along a horizontal plane and reducing the propagation of vibrations from the frame.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a rigid coupling is used between the projection module and the frame, then structural stability is improved, but vibration propagation increases
Solution Approach 1:
The patent employs a flexible coupling mechanism comprising elastic elements (such as springs or elastomeric materials) that connect the projection module to the frame. This flexible coupling allows the projection module to be isolated from vibrations transmitted through the frame while maintaining structural support, thereby reducing vibration propagation without completely sacrificing structural stability.
2Object-affected harmful factors
If a flexible coupling is used between the projection module and the frame, then vibration propagation is reduced, but positioning precision deteriorates
Solution Approach 1:
The patent incorporates a feedback control system that uses measurement means (such as sensors or interferometers) to detect the actual position of the projection module relative to the target positioning module. This position information is fed back to a control unit, which then adjusts the target positioning module to compensate for any positioning errors caused by the flexible coupling, thereby maintaining positioning precision despite the presence of flexible elements.
3Object-affected harmful factors
If complex vibration compensation systems are added, then vibration compensation capability is improved, but device complexity increases
Solution Approach 1:
The patent combines the vibration compensation function with the existing target positioning module. Instead of adding a separate complex vibration compensation system, the patent utilizes the target positioning module's capabilities to perform both target positioning and vibration compensation functions. This integration approach reduces device complexity while maintaining effective vibration compensation capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the accuracy of beam positioning by reducing the impact of residual vibrations, simplifying the system design, and reducing costs by minimizing the complexity of communication and control between subsystems.
Implementation Method 1
a flexible coupling for dampening the propagation of vibrations from said frame to said projection module
Implementation Method 2
the projection module is connected to the frame via a flexible or slack coupling for dampening or preventing the propagation of vibrations
Data Source
AI summary
The invention relates to a projection system for projecting one or more beams on a target, said system comprising a frame, a projection module comprising a beam source for providing the one or more beams, projection optics for projecting beams on the target, a target positioning module, comprising a carrier for carrying the target, a stage for carrying and positioning the carrier, a measurement system for determining a position of the projection module relative to the carrier, a controller adapted for controlling the target positioning module to position the target under the projection module based on said determined position, wherein the projection module is connected to the frame via a flexible coupling for dampening the propagation of vibrations from said frame to said projection module, and wherein the controller is adapted control the target positioning module to compensate for residual vibrations as measured by said measurement system.