Projection Objective Lever Mechanism for Lithography Alignment
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Solution Overview
Problem
Existing projection objectives for semiconductor lithography face challenges in achieving precise alignment and adjustment of optical elements with stringent imaging accuracy requirements, often resulting in complex and costly actuator systems.
Innovation Solution
A configuration with an optical axis and optical elements mounted in an objective housing, utilizing an intermediate part connected to inner and outer parts via adjusting devices that allow for high-accuracy movements in multiple degrees of freedom, including translational and rotational adjustments, using a lever mechanism with a fixed center of rotation to minimize the number of driven degrees of freedom and reduce the actuator system, sensors, and control electronics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional manipulators are used to position optical elements, then the optical elements can be adjusted, but the device complexity and cost increase due to the need for multiple actuators and sensors to achieve precise alignment in multiple degrees of freedom
Solution Approach 1:
The mounting structure is divided into three distinct parts: an outer part, an intermediate part, and an inner part. Each part has specific functions and can be adjusted independently. The intermediate part acts as a mediator between the outer and inner parts, enabling complex adjustments through simpler individual components. This segmentation allows precise positioning of optical elements without requiring complex actuator systems.
Solution Approach 2:
The intermediate part serves as a mediator between the outer part and the inner part. It connects both parts and enables relative movements between them through adjusting devices. By introducing this intermediate element, the system achieves high-precision adjustment in multiple degrees of freedom while minimizing the number of actuators and sensors needed, as the intermediate part facilitates coordinated movement between the outer and inner parts.
2Manufacturing precision
If multiple adjusting devices are used to achieve high-accuracy movement in multiple degrees of freedom, then the adjustment precision improves, but the number of actuators, sensors, and control electronics increases
Solution Approach 1:
The adjusting devices are designed to perform multiple functions. Each adjusting device can control movements in different degrees of freedom simultaneously. The intermediate part, connected to both the outer and inner parts, enables a single adjusting mechanism to achieve complex positional and orientational adjustments. This multi-functionality reduces the total number of actuators and sensors required while maintaining high adjustment accuracy.
Solution Approach 2:
The intermediate part acts as a mediator that translates simple adjustments into complex movements. By connecting the outer and inner parts, it allows a minimal number of adjusting devices to control multiple degrees of freedom. This mediation reduces the control system complexity while achieving the desired manufacturing precision through coordinated movement between the mounted part and the carrier.
3Stability of the object's composition
If optical elements are rigidly mounted to maintain stability, then the imaging accuracy is maintained, but the ability to adjust the optical elements in multiple degrees of freedom is limited
Solution Approach 1:
The mounting structure transitions from a rigid fixed connection to a dynamic adjustable connection. The intermediate part enables relative movements between the outer and inner parts while maintaining stable connections through adjusting devices. This dynamic design allows the system to adapt to different imaging requirements by adjusting optical elements in multiple degrees of freedom while maintaining stability during operation.
Solution Approach 2:
The intermediate part serves as a mediator that provides both stability and adjustability. It maintains stable connections between the outer and inner parts while enabling controlled relative movements through adjusting devices. This mediation allows the system to achieve both mounting stability and adjustment flexibility, as the intermediate part facilitates smooth transitions between different positional configurations while maintaining secure connections.
Data Source
AI summary
Objectives, such as projection objectives for semiconductor lithography, are disclosed. An objective generally has an optical axis and optical elements mounted in an objective housing. Projection exposure apparatuses having an objective are also disclosed. In addition, guides and adjusting systems for an optical element in an objective are disclosed. Further, related components and methods are disclosed.