Projector Modulating Optics for High-Precision Photomask Fabrication
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional techniques for fabricating fine photomasks with high precision are costly and time-consuming, and screen printing struggles to improve shape precision beyond tens of microns, limiting the accuracy of patterned light projection and object measurement.
Innovation Solution
A projecting apparatus with a modulating optics system that includes surface-shaped elements with alternating portions, allowing angular modulation of electromagnetic waves to achieve a predetermined entrance numerical aperture, reducing the need for air openings and simplifying the fabrication process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional photomask fabrication techniques (metal film formation, screen printing) are used to achieve high precision, then manufacturing precision is improved, but manufacturing cost and time increase significantly
Solution Approach 1:
The patent uses a master pattern (master photomask) to create multiple copies through optical projection. The master pattern is fabricated with high precision using conventional techniques, but once created, it can produce many photomasks at low cost and high speed through optical projection and photopolymerization, resolving the contradiction between precision and manufacturing efficiency
Solution Approach 2:
The patent performs preliminary action by creating a master pattern first, which contains all the precision requirements. This master pattern is then used to generate multiple photomasks through a simplified projection process, separating the precision-critical step from the mass production step
2Ease of manufacture
If screen printing is used for photomask fabrication, then ease of manufacture is improved, but manufacturing precision deteriorates (limited to tens of microns)
Solution Approach 1:
The patent segments the photomask fabrication process into two distinct stages: (1) master pattern creation using simple screen printing, and (2) photomask generation using optical projection. This segmentation allows each stage to be optimized independently - screen printing for ease of manufacture and optical projection for precision
3Ease of operation
If air openings are used in conventional photomasks to create patterned light, then optical transformation is achieved, but device complexity and fabrication difficulty increase
Solution Approach 1:
The patent replaces the mechanical/physical structure of air openings with an optical field-based approach. Instead of creating physical holes and masks, the invention uses optical projection to create the patterned light field directly, eliminating the need for complex photomask structures with air openings
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the production of high-precision photomasks at reduced costs and improves the accuracy of patterned light projection, enhancing the precision and efficiency of object measurement and pattern formation.
Implementation Method 1
a light source; modulating optics allowing at least part of incoming light from the light source to be modulated
Implementation Method 2
modulating optics allowing at least part of incoming light from the light source to be modulated, by angular modulation or change of luminance distribution
Data Source
AI summary
An apparatus is disclosed for projecting patterned electromagnetic waves onto an object. This apparatus includes: an electromagnetic-wave source; a modulating element allowing at least part of an electromagnetic wave incoming from the source to be modulated; and a selector for allowing a selected one of angular components of an electromagnetic wave outgoing from the modulating element, to pass through the selector. The modulating element is shaped to include at least one pair of two portions having different surface shapes. One of the two portions allows one of the angular components which has a radiant angle characteristic that achieves a predetermined entrance numerical aperture, to go out as a component which will be selected by the selector. The other allows one of the angular components which has a radiant angle characteristic that does not achieve the entrance numerical aperture, to go out as a component which will not be selected by the selector.