Protective coatings for cryogenic pump components in process chambers
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Solution Overview
Problem
Cryogenic pump components in semiconductor processing chambers are susceptible to corrosion and erosion due to exposure to water vapor and chlorine etchants, leading to degradation and increased particle contamination, which affects device fabrication quality and reliability.
Innovation Solution
Application of a protective coating comprising rare earth oxides or SiO2 on cryogenic pump components, such as Y3Al5O12 (YAG) or solid solutions of Y2O3 and ZrO2, which provides corrosion resistance and maintains thermal conductivity, reducing the formation of corrosive substances like hydrogen chloride.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cryogenic pump components are exposed to water vapor and chlorine etchants in processing chambers, then the pump can perform its water vapor removal function, but the components suffer from corrosion and erosion leading to degradation
Solution Approach 1:
A protective coating layer comprising silicon oxide (SiO2) and/or rare earth oxides is applied to the cryogenic pump components. This coating acts as an intermediary barrier between the corrosive environment (water vapor and chlorine etchants) and the underlying metal components, preventing direct contact and chemical reactions that would cause corrosion and erosion.
Solution Approach 2:
The protective coating utilizes composite material composition combining silicon oxide and rare earth oxides. This composite structure provides enhanced corrosion and erosion resistance compared to single-material coatings, while maintaining the necessary thermal conductivity for cryogenic operation. The composite nature allows optimization of both protective properties and thermal performance.
2Object-affected harmful factors
If a protective coating is applied to cryogenic pump components, then corrosion resistance is improved, but the coating must maintain thermal conductivity to preserve cryogenic functionality
Solution Approach 1:
The coating composition and structure are optimized to achieve the right balance between corrosion protection and thermal conductivity. By controlling the composition ratios of silicon oxide and rare earth oxides, and adjusting coating thickness parameters, the system achieves sufficient corrosion resistance while maintaining adequate thermal conductivity for cryogenic water vapor condensation function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protective coating effectively reduces water vapor partial pressure, minimizes metal particle contamination, and extends the service life of cryogenic pumps, enhancing processing chamber cleanliness and reducing maintenance downtime.
Implementation Method 1
The protective coating includes at least one of a rare earth oxide or SiO2... provides corrosion resistance... minimizing the formation of corrosive substances like hydrogen chloride
Implementation Method 2
maintains thermal conductivity... cryogenic plate coupled with the refrigeration unit... reduce the partial pressure of H2O (e.g., water) within the processing chamber
Data Source
AI summary
A cryogenic pump includes a refrigeration unit and a cryogenic plate coupled with the refrigeration unit. The cryogenic plate includes a plate body and a protective coating on at least one surface of the plate body. The protective coating includes at least one of a rare earth oxide or SiO2.