Protective Glass UV Ashing With Humidity-Controlled Cleaning
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Solution Overview
Problem
Existing methods for cleaning optical components in laser processing machines, such as protective glasses, are inefficient due to humidity-dependent ultraviolet ashing, leading to incomplete cleaning and potential equipment failures, especially when humidity is low or high, causing clouding and requiring frequent glass replacements.
Innovation Solution
A method involving the use of humidity-controlled humidified gas with controlled temperature, supplied during ultraviolet irradiation, to stabilize the generation of OH radicals for effective decomposition of organic matter on optical components, maintaining humidity between 30% to 90% and ensuring the gas temperature matches or is lower than the laser head temperature, and integrating the humidified gas supply with the cutting gas system to prevent oxidation and dew condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ultraviolet irradiation is performed under a sufficient oxygen atmosphere, then organic matters can be decomposed by UV ashing, but the cleaning effect is insufficient when the humidity at which the air dries is low
Solution Approach 1:
The invention changes the humidity parameter of the atmosphere from ambient conditions to a controlled range of 30% to 90% relative humidity. By actively controlling the humidity parameter, the cleaning effect becomes reliable regardless of external humidity conditions. The ultraviolet irradiation device operates in conjunction with humidity control to ensure consistent OH radical generation and organic matter decomposition.
Solution Approach 2:
The invention introduces humidified air as an intermediary medium between the ultraviolet irradiation source and the organic contaminants. This humidified atmosphere serves as a mediator that enhances the UV ashing process by providing sufficient water molecules that can be excited by UV radiation to generate OH radicals, which are highly effective at decomposing organic matters. The humidified air acts as a bridge that connects the UV energy to the cleaning action.
2Reliability
If replacement of protective glass is performed to remove contamination, then cleaning effectiveness is restored, but the work is time-consuming and requires interruption of laser processing
Solution Approach 1:
The invention enables the protective glass to clean itself through UV ashing without requiring removal or replacement. The ultraviolet irradiation device is integrated into the laser head assembly, allowing in-situ cleaning of the protective glass during or between processing operations. This self-service capability eliminates the need for manual intervention and glass replacement, significantly reducing downtime.
Solution Approach 2:
The invention performs preliminary cleaning action by continuously or periodically applying ultraviolet irradiation to the protective glass before contamination reaches a level that requires replacement. By maintaining the protective glass in a clean state through preventive UV ashing, the system avoids the need for time-consuming replacement operations and ensures consistent cleaning effectiveness throughout the processing period.
3Reliability
If humidified gas is supplied to improve cleaning effect, then OH radicals can be generated reliably, but dew condensation may occur when humidity becomes 90% or more
Solution Approach 1:
The invention employs dynamic humidity control within the range of 30% to 90% relative humidity, allowing the system to adapt to different operating conditions. The humidity level can be adjusted based on environmental conditions, processing requirements, and temperature variations. This dynamic approach ensures sufficient OH radical generation while preventing dew condensation by maintaining humidity below the saturation point.
Solution Approach 2:
The invention implements feedback control for humidity management, where the actual humidity level is monitored and used to adjust the humidification rate. When humidity approaches 90%, the system reduces or stops humidification to prevent dew condensation. This feedback mechanism ensures that the humidity remains within the optimal range for OH radical generation without causing harmful condensation effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures reliable and efficient removal of organic matter from optical components, preventing equipment failures and maintaining optimal cleaning effectiveness across varying humidity levels, while compactly integrating cleaning and processing configurations.
Implementation Method 1
radiating ultraviolet rays on the surface of the optical component while supplying humidity-controlled humidified gas to perform cleaning by UV ashing
Implementation Method 2
decompose organic matters without detaching the optical components from the laser head, by UV ashing which irradiates the optical components such as protective glass with ultraviolet rays under a sufficient oxygen atmosphere
Implementation Method 3
supplying humidity-controlled humidified gas to perform cleaning by UV ashing. Therefore, it is possible to reliably generate OH radicals and stabilize the process of removing organic matters
Data Source
AI summary
In the method for cleaning optical components by UV ashing according to the present embodiment, while supplying humidity-controlled humidified gas, ultraviolet rays are radiated to the surface of the protective glass to remove organic matters on the surface of the protective glass. Further, in the cleaning method of the present embodiment, the humidified gas is supplied so that the humidity in the laser head during cleaning becomes 30% to 90%.