Protective Member Formation Using Camera-Based Air Bubble Detection
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Solution Overview
Problem
Existing protective member forming apparatuses fail to effectively remove air bubbles between a holder table and a sheet, leading to uneven thickness of the protective member, which in turn causes uneven grinding of wafers.
Innovation Solution
A protective member forming apparatus equipped with a camera to capture images of the sheet on the holder table, analyzing differences in color tones and brightness to detect air bubbles, and a controller to determine and address the issue by notifying operators or performing corrective actions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a roller is used to urge the sheet against the holder table to remove air, then air removal is improved, but air bubbles may still remain due to dust adhesion
Solution Approach 1:
The patent applies preliminary action by using a camera to detect air bubbles before the protective member is fully formed. The detection unit captures images of the sheet on the holder table, and the control unit identifies air bubble positions in advance, allowing for preventive measures to be taken before the lamination process completes, thus avoiding thickness不均匀 in the final product
Solution Approach 2:
The patent implements feedback by using a camera-based detection system that provides real-time information about air bubble presence. The control unit receives image data, processes it to identify air bubbles, and can trigger notifications or corrective actions based on the detection results, creating a closed-loop control system that continuously monitors and adjusts the lamination process
2Productivity
If the sheet is pressed against the holder table with a roller, then air is generally removed, but air bubbles may remain due to dust adhesion
Solution Approach 1:
The patent replaces the purely mechanical roller-based air removal system with an optical detection system. Instead of relying solely on mechanical pressure to eliminate air bubbles, the system uses a camera to optically detect their presence, and the control unit processes this information to determine whether repositioning or additional pressing is needed, substituting mechanical trial-and-error with optical precision
3Manufacturing precision
If air bubbles remain between the holder table and sheet, then the protective member thickness becomes uneven, but detecting and correcting this requires additional equipment
Solution Approach 1:
The patent introduces an intermediary detection system consisting of a camera and control unit that mediates between the lamination process and the final product quality. The camera captures images of the sheet, the control unit processes these images to detect air bubbles, and this intermediary information system enables precise control without requiring complex mechanical modifications to the pressing mechanism
Solution Approach 2:
The patent uses copying by creating an optical copy (image) of the sheet on the holder table. The camera captures a visual representation of the sheet's position and any air bubbles present, allowing the control unit to analyze this copied information and make decisions about corrective actions without directly manipulating the physical sheet during the detection phase
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures the formation of a protective member with even thickness by eliminating air bubbles, preventing uneven grinding of wafers.
Implementation Method 1
a camera (47) configured to capture an image of the sheet (11)
Implementation Method 2
a light (28) configured to irradiate the sheet (11) held on the holder table (21)
Data Source
AI summary
A protective member forming apparatus includes a holder table configured to hold a sheet on a holder surface, a sheet feeder assembly configured to feed the holder table with the sheet, an attaching assembly configured to attach the sheet held on the holder table to a wafer, a light configured to irradiate the sheet held on the holder table, a camera configured to capture an image of the sheet, and a determining unit configured to determine whether air remains between the holder table and the sheet or not based on a difference in color tones, brightnesses, or colors in the image captured by the camera.