Protective Member Forming Apparatus Resin Spreading Control
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Solution Overview
Problem
Existing protective member forming apparatuses fail to ensure sufficient spreading of liquid resin over the substrate's surface, leading to inadequate support during grinding and resulting in non-uniform grinding results and residue issues.
Innovation Solution
A protective member forming apparatus that includes a support table, liquid resin supply unit, pressing unit with a light-transmitting pressing surface, ultraviolet irradiating unit, and a determining unit with a camera to photograph and assess the resin spread, ensuring the resin is spread over the predetermined range before curing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thick glue layer is used to accommodate projections and depressions, then the protective member can be sufficiently affixed to the substrate, but residue of the glue layer remains on the projections and depressions when peeled off
Solution Approach 1:
The invention extracts the harmful glue layer from the device formation region by using a resin film that is larger than the substrate. The resin film extends beyond the substrate edges, allowing the glue layer to be applied only to the peripheral surplus region where it is needed for fixation, while preventing glue from reaching and remaining on the projections and depressions in the device formation region.
Solution Approach 2:
The resin film acts as an intermediary barrier between the glue layer and the device formation region. This mediator allows the glue to fulfill its fixation function in the peripheral region while blocking it from contaminating the device areas, thus resolving the contradiction between fixation stability and residue prevention.
2Productivity
If the liquid resin is not sufficiently spread, then the protective member formation is faster and simpler, but the substrate is not properly supported during grinding resulting in non-uniform grinding results
Solution Approach 1:
The invention applies preliminary action by using a pressing unit to spread the liquid resin uniformly across the substrate surface before the ultraviolet irradiation curing step. This ensures that the resin properly fills projections and depressions and provides adequate support for subsequent grinding operations, while maintaining an efficient two-step process of spreading followed by curing.
3Reliability
If a film larger than the substrate is used to prevent resin from reaching the outside, then the liquid resin is held down and does not go around to the undersurface side, but the resin may not be sufficiently spread over the predetermined range
Solution Approach 1:
The invention applies dynamics by making the resin film movable through the pressing unit. The pressing unit applies pressure to spread the liquid resin across the substrate surface while the resin film moves to accommodate the spreading resin. This dynamic approach ensures both sufficient resin spread and proper containment, as the film can adapt to the resin flow while preventing it from reaching the undersurface side.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures proper spreading of the liquid resin, preventing grinding non-uniformities and residue issues, allowing for effective substrate support and proper formation of the protective member.
Implementation Method 1
an ultraviolet irradiating unit configured to cure the liquid resin by irradiating the liquid resin with ultraviolet rays through the pressing surface and the cover sheet
Data Source
AI summary
A protective member forming apparatus for forming a protective member on the top surface of a substrate by laminating a liquid resin and a cover sheet on a resin film includes: a liquid resin supply unit configured to supply the liquid resin onto the resin film; a pressing unit including a pressing surface, the pressing unit being configured to spread the liquid resin over the resin film by pressing the liquid resin by the pressing surface via the cover sheet; and a determining unit configured to determine the state of the spread liquid resin. The determining unit includes a determining section configured to determine whether or not the liquid resin is spread over a predetermined range with respect to the substrate.