Protective-Pipe Substrate Temperature Sensing Without Cable Twist

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Solution Overview

Problem

Existing substrate temperature measurement systems face disconnection issues when the substrate retainer is rotated, preventing the rotation of the boat and substrate due to cable disconnection.

Innovation Solution

A substrate temperature sensor is integrated within a protective pipe passing through a notch in the substrate retainer's bottom plate, allowing wireless transmission of temperature data to prevent cable disconnection during rotation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a cable is used to transmit temperature data from the substrate, then temperature measurement is enabled, but the cable may disconnect when the substrate retainer is rotated

Engineering Contradiction:

Improvetemperature measurementVSAvoidcable connection reliability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent replaces the mechanical cable connection system with a wireless communication system. The temperature sensor transmits data wirelessly to the external controller, eliminating the mechanical cable that would disconnect during rotation. This substitution of mechanical transmission with electromagnetic transmission resolves the contradiction by maintaining measurement capability without the connection reliability issue.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent extracts the cable from the system by implementing wireless communication. The temperature sensor and controller communicate without a physical cable connection, removing the source of the disconnection problem while preserving the temperature measurement function.

Inventive Principle:

Principle #2Taking out (Extraction)

2Productivity

If the substrate retainer is rotated to improve processing efficiency, then productivity increases, but the cable disconnects preventing rotation

Engineering Contradiction:

Improveprocessing efficiencyVSAvoidcable connection

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

By replacing the mechanical cable connection with wireless communication, the system enables rotation of the substrate retainer without cable disconnection. This allows the productivity benefit of rotation to be realized while eliminating the reliability problem that previously prevented rotation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent makes the connection system dynamic by using wireless communication that can accommodate movement and rotation. Unlike a fixed mechanical cable connection, the wireless system maintains connectivity during dynamic operations such as rotation, enabling improved productivity.

Inventive Principle:

Principle #15Dynamics

3Loss of information

If a cable is routed along the support column and through the seal cap, then temperature data transmission is achieved, but the cable is susceptible to disconnection during rotation

Engineering Contradiction:

Improvetemperature data transmissionVSAvoidrotation operation

Core Design Contradiction:

Loss of informationVSEase of operation

Solution Approach 1:

The patent replaces the mechanical cable routing system with wireless communication. The temperature sensor transmits data wirelessly without requiring cable routing along support columns or through seal caps, eliminating the disconnection risk during rotation while maintaining data transmission capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS11906367B2Substrate temperature sensor, substrate retainer and substrate processing apparatus

Publication Date: 2024.02.20 KOKUSAI DENKI KK

AI summary

According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe passing through a notch provided at least in a bottom plate of a substrate retainer inserted into a process chamber in a state where the substrate is mounted on the substrate retainer.