Protruding Biosensor Electrodes for Enhanced Electric Field Coverage
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Solution Overview
Problem
The development of biosensor chips with higher performance and lower costs is hindered by manufacturing and design challenges, particularly in achieving three-dimensional designs and optimizing electric field coverage for enhanced sensitivity and reduced background signals in detecting biological molecules.
Innovation Solution
A biosensor device is manufactured with a substrate plate, a metal conductive layer, and working electrodes that protrude beyond an insulating layer, allowing for a controlled electric field generation and improved electrochemical reactions, using a method that includes depositing and patterning conductive layers, forming insulating layers, and connecting biological probes to the electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If working electrodes are made protruding beyond the insulating layer, then sensitivity and electric field coverage are improved, but manufacturing complexity increases
Solution Approach 1:
The working electrodes are designed to protrude vertically beyond the insulating layer surface, transitioning from a planar two-dimensional configuration to a three-dimensional structure. This vertical extension increases the electric field coverage area and enhances sensitivity without requiring additional lateral space, effectively utilizing the third dimension to resolve the contradiction between detection performance and device footprint.
Solution Approach 2:
The insulating layer is selectively positioned to cover only portions of the electrode structure, leaving the working electrode tips exposed. This local differentiation in insulation coverage allows the electrode surface area to be maximized for sensing while maintaining electrical isolation where needed, optimizing both sensitivity and manufacturing feasibility.
2Measurement precision
If electrode width is reduced to improve sensitivity, then detection capability increases, but manufacturing precision requirements increase
Solution Approach 1:
Instead of relying solely on reducing electrode width in the lateral plane to improve sensitivity, the design extends electrodes vertically to protrude beyond the insulating layer. This three-dimensional approach increases the effective sensing area and electric field coverage without requiring extremely precise control of lateral dimensions, thereby reducing manufacturing precision requirements while maintaining enhanced detection capability.
3Measurement precision
If three-dimensional electrode design is implemented, then electric field coverage is enhanced, but device complexity increases
Solution Approach 1:
The patent implements a controlled three-dimensional electrode structure where working electrodes protrude vertically beyond the insulating layer surface. This vertical extension enhances electric field coverage and sensitivity by increasing the effective electrode surface area exposed to the analyte, while the overall device structure remains relatively simple and compatible with standard semiconductor manufacturing processes.
Solution Approach 2:
The insulating layer is applied selectively to cover specific regions while leaving working electrode tips exposed. This local differentiation creates the three-dimensional effect where electrodes protrude only at critical sensing locations, enhancing electric field coverage without requiring complex three-dimensional structures throughout the entire device, thus balancing performance enhancement with structural simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances sensitivity and reduces background signals by extending the electric field coverage to the sidewalls of the electrodes, enabling effective detection of biological molecules with smaller electrode widths and improved signal strength, while maintaining reliability and reducing manufacturing defects.
Implementation Method 1
when a voltage is applied to the working electrodes, each of the working electrodes generates an electric field surrounding the working electrodes
Data Source
AI summary
A biosensor device includes a substrate plate, a metal conductive layer, a plurality of working electrodes and an insulating layer. The metal conductive layer is disposed over the substrate plate and has an upper surface. The working electrodes are disposed over the upper surface of the metal conductive layer, wherein each of the working electrodes has a top surface and each of the top surfaces is higher than the upper surface of the metal conductive layer. The insulating layer covers the metal conductive layer and surrounds the working electrodes, wherein an upper surface of the insulating layer is located between the top surfaces and the upper surface of the metal conductive layer such that the working electrodes protrude beyond the upper surface of the insulating layer. A method for manufacturing the biosensor device and a method for detecting biological molecules by using the biosensor device are also provided herein.