Protrusion Microelectrode Structure for Accurate Biological Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing biological detection devices have low detection accuracy due to inadequate contact between the electrode layer and the object under detection.
Innovation Solution
A microelectrode structure with a protrusion on the insulating layer, where the electrode layer conformally covers both the insulating layer and the protrusion, increasing the contact area and including sensitive functional layers for enhanced detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the electrode layer is made flat and conforms only to the insulating layer, then the manufacturing process is simple, but the contact area with the object under detection is insufficient, leading to low detection accuracy
Solution Approach 1:
The electrode layer is designed to extend in the vertical dimension by conformally covering the protrusion structure on the insulating layer. This three-dimensional configuration increases the contact area with the object under detection without significantly complicating the manufacturing process, as it uses standard conformal deposition techniques. The protrusion creates additional surface area in the vertical direction, enabling better signal conversion and detection accuracy.
2Measurement precision
If the electrode layer contact area is increased by adding protrusions, then detection accuracy improves, but the manufacturing precision requirements increase
Solution Approach 1:
The protrusion structure is formed on the insulating layer before the electrode layer is deposited. This preliminary formation of the protrusion provides a pre-defined template that guides the subsequent conformal electrode deposition. By establishing the three-dimensional structure first, the manufacturing process benefits from a clear geometric reference, reducing the precision requirements for the electrode layer formation itself, as the conformal deposition naturally follows the pre-formed protrusion geometry.
Data Source
AI summary
The present disclosure provides a biological detection device, a biological chip, a microelectrode structure, and a manufacturing method of the microelectrode structure. The microelectrode structure can include a first insulating layer, a protrusion, and an electrode layer. The protrusion is disposed on the first insulating layer. The electrode layer conformally covers the first insulating layer and the protrusion. The present disclosure can improve the detection accuracy.