Automated PSD Sensor Adjustment for Metrology Alignment
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Solution Overview
Problem
Optical metrology systems, such as opto-acoustic systems, require manual alignment and maintenance of PSD sensors, making it time-consuming to adapt to new products or features, and limiting the ability to optimize sensitivity and discover new applications.
Innovation Solution
An automated sensor adjustment mechanism using a movable wave front splitter to dynamically adjust the radiant power distribution between cells of a split-cell detector, allowing for quick modification of sensor settings and optimal data capture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual alignment and maintenance of PSD sensors is used, then the system can operate with simple structure, but it is time-consuming to adapt to new products or features and cannot optimize sensitivity
Solution Approach 1:
The patent implements dynamic adjustment of sensor settings through automated mechanisms. The system can modify sensor parameters, alignment, and sensitivity settings in real-time based on the specific measurement requirements, enabling quick adaptation to different products and features without manual intervention for each change.
Solution Approach 2:
The system incorporates self-aligning and self-optimizing capabilities that automatically adjust sensor parameters and maintain optimal performance. This self-service functionality eliminates the need for time-consuming manual alignment and maintenance, allowing the system to adapt to new applications autonomously.
2Measurement precision
If manual modification of sensor settings is required, then the system structure remains simple, but the sensitivity optimization and discovery of new applications is prevented
Solution Approach 1:
The patent introduces an automated control system that acts as an intermediary between the user and the complex sensor adjustment mechanisms. This intermediary layer manages the complexity of multiple sensor parameters, alignment adjustments, and optimization algorithms, while presenting a simplified interface to the user and achieving high measurement precision through automated sensitivity optimization.
3Measurement precision
If multiple PSD sensors are used to measure film thickness, then measurement capability is improved, but manual alignment and maintenance becomes more time-consuming
Solution Approach 1:
The patent combines multiple PSD sensors into an integrated sensor array system with unified control. This merging approach allows simultaneous operation of multiple sensors for comprehensive film thickness measurement while using centralized automated alignment and maintenance mechanisms, thereby maintaining enhanced measurement capability without the time penalty of individually managing each sensor.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible and automated operation of metrology systems to capture high-quality data, optimize sensor performance, and correlate features of interest, both current and future, in semiconductor manufacturing processes.
Implementation Method 1
The pump beam 10 causes rapid expansion in the surface 16 as shown by bump 15
Implementation Method 2
This rapid expansion creates a shock or stress wave that is dispersed into the sample 14
Implementation Method 3
As stress waves propagating within the sample 16 intersect the surface 16, they can cause a deformation in the surface 16
Implementation Method 4
the system shown in Fig. 1 can also measure the deflection of a probe beam 12 that is caused by the same stress waves
Implementation Method 5
A probe beam 12 is directed onto and reflected from sample 14. The reflected probe beam is incident upon a sensor 20
Data Source
Figure 1~3
Figure 4a~5
Figure 4b
AI summary
An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.