Pseudo Defect Sample for Ultrasonic Flaw Detection Sensitivity Adjustment
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Solution Overview
Problem
Conventional pseudo defect samples are not suitable for inspecting fine defects in target materials used for sputtering, as they require a larger diameter for the flat-bottomed hole, making it difficult to focus ultrasonic waves accurately and adjust sensitivity for ultrasonic flaw detection.
Innovation Solution
A pseudo defect sample with a counterbore and a flat-bottomed hole having a specific ratio of equivalent circle diameter to depth, allowing for easier recognition and positioning of the flat-bottomed hole, even when the diameter is small, by focusing on the counterbore's bottom surface, thereby simplifying sensitivity adjustment and reducing the time required for ultrasonic flaw detection measurement condition adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the diameter of the flat-bottomed hole in the pseudo defect sample is reduced to match fine defects in target material, then the applicability to target material inspection is improved, but the ease of focusing ultrasonic waves and positioning becomes difficult
Solution Approach 1:
The pseudo defect sample is divided into two distinct structural elements: a counterbore (larger diameter) and a flat-bottomed hole (smaller diameter) positioned at its bottom. This segmentation allows each element to serve a specific function - the counterbore facilitates easy ultrasonic wave focusing and positioning, while the flat-bottomed hole provides the appropriate defect size for target material inspection calibration.
Solution Approach 2:
The counterbore acts as an intermediary structure that mediates between the ultrasonic probe and the small flat-bottomed hole. By providing a larger counterbore opening, it serves as an intermediate zone that makes it easier to focus ultrasonic waves and position the probe, while still allowing accurate detection of the smaller flat-bottomed hole that represents the fine defects in target material.
2Measurement precision
If the diameter of the flat-bottomed hole is reduced for fine defect inspection, then the measurement precision for fine defects is improved, but the time required for sensitivity adjustment increases
Solution Approach 1:
The segmented structure with counterbore and flat-bottomed hole allows operators to first easily locate and focus on the larger counterbore (saving time), and then accurately measure the smaller flat-bottomed hole (achieving precision). This two-stage approach separates the positioning function from the measurement function, optimizing both time and precision.
3Ease of operation
If a larger diameter flat-bottomed hole is used in the pseudo defect sample, then the ease of positioning and focusing is improved, but the applicability to fine defect inspection in target material deteriorates
Solution Approach 1:
Different parts of the pseudo defect sample have different local qualities - the counterbore has a larger diameter optimized for ease of positioning and focusing, while the flat-bottomed hole at its bottom has a smaller diameter optimized for representing fine defects in target material. This local differentiation allows the single sample to fulfill multiple functions effectively.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The pseudo defect sample enables easy sensitivity adjustment and accurate detection of small flat-bottomed holes, improving the efficiency of ultrasonic flaw detection and ensuring the quality of sputtering targets by reducing defects.
Implementation Method 1
the ultrasonic waves emitted from the ultrasonic probe are focused on the hole, and then the reflected echo from the bottom surface of the hole is measured
Implementation Method 2
the reflected echo from the bottom surface of the hole is measured to adjust the sensitivity of the ultrasonic flaw detection
Data Source
AI summary
A pseudo defect sample for adjusting an ultrasonic flaw detection measurement condition to inspect a defect within a target material,the pseudo defect sample comprising a substrate which has a first surface and a second surface opposed to the first surface,the substrate having a counterbore which is formed therein from a side of the first surface to a first depth, and a flat-bottomed hole which is formed from the bottom surface of the counterbore to a second depth and formed in a part of a bottom surface of the counterbore, anda ratio ϕ/d of an equivalent circle diameter ϕ of the flat-bottomed hole to the second depth d of the flat-bottomed hole being:0.08 or more and less than 0.40 when the equivalent circle diameter ϕ of the flat-bottomed hole is less than 0.3 mm;0.1 or more and less than 0.60 when the equivalent circle diameter ϕ of the flat-bottomed hole is 0.3 mm or more and less than 0.4 mm; and0.11 or more and less than 1.60 when the equivalent circle diameter ϕ of the flat-bottomed hole is 0.4 mm or more.