Point Spread Function Determination via Stacked Reference Images
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Solution Overview
Problem
Current methods for determining the point spread function (PSF) of charged particle beams in scanning electron microscopes are complex and time-consuming, leading to potential errors and limitations in achieving high image resolution and clarity, especially since direct measurement is not feasible with existing detectors.
Innovation Solution
An image processing system and method that involves selecting a reference structure with known features, capturing calibration images, identifying and combining similar features to form a stacked feature image, and determining the PSF by comparing it with a reference image, allowing for improved image resolution and clarity without requiring direct measurement of the PSF.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If computational methods are used to determine the point spread function, then the PSF can be obtained without direct measurement, but the computation becomes extremely complex and time-consuming
Solution Approach 1:
The patent uses a reference structure with known features to create a reference image that serves as a template. By capturing multiple images of this reference structure and stacking them, the system creates a composite reference image that represents the ideal PSF without requiring complex computational deconvolution. This copying approach simplifies the determination process while maintaining accuracy.
Solution Approach 2:
The patent performs preliminary actions by first capturing and stacking multiple images of a reference structure to create a reference image before attempting to determine the PSF. This pre-processing step establishes a known baseline that simplifies subsequent PSF calculation, avoiding the need for complex real-time computational methods.
2Measurement precision
If computational methods are used to determine the point spread function, then direct measurement is avoided, but the process becomes time-consuming
Solution Approach 1:
The patent combines multiple captured images of the reference structure into a single stacked reference image. By merging multiple measurements into one composite image, the system obtains a more reliable reference for PSF determination while reducing the time required for complex iterative computations that would otherwise be needed to achieve the same accuracy.
Solution Approach 2:
The reference structure serves as a physical copy or template of the ideal PSF. By using this pre-established reference image rather than performing complex computational deconvolution on each individual image, the system dramatically reduces computation time while maintaining measurement precision.
3Manufacturing precision
If higher power and more expensive microscopes are used, then image resolution and clarity improve, but the cost and operational complexity increase
Solution Approach 1:
The patent uses the reference image as a feedback standard to evaluate and correct the actual PSF. By comparing captured images against the reference structure with known features, the system can determine the actual PSF and use this information to restore and enhance image quality, allowing less powerful microscopes to achieve resolution comparable to more expensive instruments.
Solution Approach 2:
The reference structure acts as an intermediary between the microscope and the sample. By first characterizing the microscope's PSF using the reference structure, the system creates a transfer function that can then be applied to restore images of actual samples, enabling high-resolution imaging without requiring the microscope hardware itself to be extremely powerful.
Data Source
AI summary
The disclosure relates to systems and method for processing images. The method includes selecting a predetermined reference structure, the predetermined reference structure having a known feature size/shape. The method also includes obtaining a reference image of the predetermined reference structure, and capturing a calibration image of the predetermined reference structure using an observation device. The calibration image includes a plurality of features. Additionally, the method includes identifying at least one portion of the plurality of features of the calibration image that include a feature size/shape substantially similar to the known feature size and shape of the predetermined reference structure. Finally, the method includes combining the identified portion of the plurality of features of the calibration image to form a stacked feature image, and determining a point spread function (PSF) of the observation device by comparing the obtained reference image with the stacked feature image.