Pulse Gas Delivery Control Using Real-Time Concentration Feedback
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Solution Overview
Problem
Existing pulse gas delivery systems for processes like Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE) struggle to maintain precise mole amounts of process gas due to variations in gas concentration, leading to inconsistent process results.
Innovation Solution
A method and apparatus that measures process gas concentration and adjusts flow setpoint and/or pulse duration to control the mole amount of process gas delivered in each pulse, using a gas concentration measurement system and a pulse gas delivery system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If existing pulse gas delivery systems are used to deliver process gas mixed with carrier gas, then the total mole amount in each pulse can be controlled, but the mole amount of process gas in each pulse varies due to concentration variations
Solution Approach 1:
The system incorporates a gas concentration measurement device that provides real-time feedback on the process gas concentration in the mixture. The controller uses this feedback information to dynamically adjust the flow rate of carrier gas, ensuring that the mole amount of process gas in each pulse remains consistent despite concentration variations. This closed-loop feedback mechanism directly resolves the contradiction by enabling precise control of process gas quantity based on actual concentration measurements.
Solution Approach 2:
The system changes the flow rate parameter of carrier gas dynamically based on measured process gas concentration. When concentration is high, carrier gas flow is reduced; when concentration is low, carrier gas flow is increased. This parameter adjustment ensures consistent process gas delivery despite variations in the generation process, resolving the precision issue while maintaining total mole amount control.
2Adaptability or versatility
If the concentration of process gas varies during the process due to chemical reaction output variations, then the process gas generation is flexible, but precise mole delivery amount of process gas cannot be guaranteed
Solution Approach 1:
The measurement device continuously monitors process gas concentration and feeds this information back to the controller. This enables the system to adapt to concentration variations caused by chemical reaction output changes while maintaining precise mole delivery control through dynamic carrier gas flow adjustment.
Solution Approach 2:
The system uses its own measurement capability to automatically adjust its operation. The controller regulates carrier gas flow based on real-time concentration measurements from the system's own sensor, enabling self-correcting precise delivery without external intervention despite variations in process gas generation.
3Manufacturing precision
If flow setpoint and pulse duration are adjusted based on real-time concentration measurements, then precise mole delivery is achieved, but system complexity increases
Solution Approach 1:
The controller performs multiple functions: it manages pulse timing, regulates carrier gas flow, and processes concentration measurement data. By integrating these functions into a single control unit, the system achieves precise mole delivery without proportionally increasing overall system complexity. The measurement device also serves dual purposes by providing both concentration data for control and verification of delivery accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures precise mole delivery of process gas by continuously adjusting flow setpoint and/or pulse duration based on real-time concentration measurements, maintaining consistent process conditions.
Implementation Method 1
The gas concentration measurement system may comprise an optical gas sensor, a surface acoustic wave device, an ultrasound sensor, a mass spectrometer or a thermal conductive detector
Implementation Method 2
The pulse gas delivery system is configured to sense flow of the gas mixture and control flow of the gas mixture
Implementation Method 3
controls an amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas to control a mole amount of the process gas delivered to a process chamber in each pulse
Data Source
AI summary
A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.