Pulse Gas Delivery With Isolation Valves and Flow Feedback Control
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Solution Overview
Problem
Existing pulse gas delivery systems for semiconductor processes face challenges in accuracy, repeatability, and speed due to reliance on host controller calculations and shut-off valve performance, leading to inefficient gas usage and contamination.
Innovation Solution
A fluid control system with a pulse mass flow controller (MFC) that includes an isolation valve and a controller using feedback from a flow sensor to precisely control the flow rate, pressure, and temperature, allowing for accurate and rapid pulse delivery by adjusting the flow set point and pulse duration based on estimated moles of fluid delivered.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If existing pulse gas delivery systems rely on host controller calculations and shut-off valve performance, then device complexity is reduced, but manufacturing precision and reliability deteriorate
Solution Approach 1:
The patent combines the host controller, isolation valve, and pulse MFC into an integrated system where the host controller directly manages both the isolation valve and pulse MFC operations. This merging eliminates the need for separate calculation systems and improves coordination between components, thereby enhancing pulse delivery accuracy while maintaining manageable system complexity.
Solution Approach 2:
The patent implements feedback mechanisms where the host controller continuously monitors pulse delivery parameters and adjusts control signals to the isolation valve and pulse MFC accordingly. This closed-loop control ensures high manufacturing precision by compensating for deviations in real-time, resolving the contradiction between simplicity and accuracy.
2Ease of operation
If existing systems use traditional shut-off valve control, then ease of operation is maintained, but productivity and speed deteriorate
Solution Approach 1:
The patent employs dynamic control strategies where the host controller adjusts the isolation valve and pulse MFC operations in real-time based on process requirements. This dynamic approach enables faster pulse delivery speeds while maintaining ease of operation through automated control algorithms that handle complexity internally, presenting a simple interface to users.
3Device complexity
If existing pulse gas delivery systems are used, then device complexity is low, but loss of substance increases due to inefficient gas usage and contamination
Solution Approach 1:
The host controller monitors gas delivery parameters and provides feedback to adjust the isolation valve and pulse MFC operations, optimizing gas usage efficiency. This feedback mechanism prevents over-delivery and contamination by precisely controlling pulse parameters, thereby reducing gas loss while maintaining a relatively simple integrated system configuration.
Solution Approach 2:
The patent dynamically changes operational parameters such as pulse duration, flow rate, and timing through the host controller to optimize gas delivery efficiency. By adjusting these parameters based on process requirements, the system minimizes gas waste and contamination while maintaining straightforward system operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and speed of pulse gas delivery, minimizes gas usage, reduces contamination, and eliminates control valve leaks, making it suitable for fast pulse delivery applications like ALD and TSV processes.
Implementation Method 1
The flow sensor includes an upstream pressure sensor configured to detect an upstream pressure in the flow channel at an upstream position between the control valve and the flow restrictor, and a downstream pressure sensor configured to detect a downstream pressure in the flow channel at a downstream position between the flow restrictor and the isolation valve. The flow sensor measures flow rate based on the upstream pressure and the downstream pressure.
Data Source
AI summary
A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.