Modular High-Power Pulse Generator With Overshoot-Controlled Coupling
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical, pulsed voltage supplies, which often exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator system comprising multiple low power generators with energy storage components, electrically connected through a coupling mechanism, and controlled by a unit to generate high voltage and current pulses with step-function outputs, reducing voltage overshoots and enabling efficient power delivery to capacitive loads.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The patent divides a single high power generator into multiple low power generators, each operating within safe voltage limits. The low power generators are connected in series through a coupling mechanism to achieve the required high output voltage, while each individual semiconductor switch only handles a fraction of the total voltage, ensuring reliable operation within manufacturer specifications.
2Reliability
If multiple low power generators are connected in series to achieve high voltage output, then the voltage handling capability is maintained, but the complexity of the system increases
Solution Approach 1:
The patent employs identical low power generator modules that can be replicated and connected in series. Each module serves multiple functions: generating power, limiting voltage to safe levels, and providing a standardized interface for coupling. This modular approach reduces overall system complexity by using repeated, proven designs rather than custom high-voltage components.
Solution Approach 2:
The coupling mechanism acts as an intermediary between multiple low power generators, enabling their series connection to achieve high voltage output. The coupling includes switching elements that control the series connection dynamically, managing the complexity of coordinating multiple generators while maintaining simple individual generator designs.
3Power
If low power generators are connected through a coupling mechanism, then the voltage output is increased, but voltage overshoots may occur at the output
Solution Approach 1:
The control unit continuously monitors the output voltage and switching states of the low power generators. Based on this feedback, it dynamically adjusts the switching of coupling elements to prevent voltage overshoots. The control unit coordinates the activation and deactivation of generators and coupling switches to ensure smooth transitions and maintain voltage within safe limits.
Solution Approach 2:
The control unit pre-coordinates the switching sequences of coupling elements before voltage transitions occur. By anticipating potential overshoot conditions and pre-positioning switching elements in optimal states, the system prevents voltage overshoots before they occur, ensuring smooth voltage transitions at the output.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively delivers high power pulses with varying amplitudes to plasma processes, reducing power losses and maintaining efficient operation within the voltage and current handling limits of semiconductor switches, thus addressing the limitations of existing technologies.
Implementation Method 1
Each respective low power generator comprises an energy storage component, in particular a capacitor
Implementation Method 2
The low power generators are electrically connected in a coupling, in particular in series connection, such that a coupling value at an output of the coupling
Implementation Method 3
Often the voltage values significantly exceed the voltage handling possibilities of individual semiconductor switches, especially when high frequency operation is required
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The control unit is further configured to select the contribution of each of the plurality of LP generators in a way to reduce voltage overshoots at the output of the HP generator and/or at a dedicated location on the capacitive load.