Pulse Laser Beam Divergence Control for Precise Feature Shaping
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Solution Overview
Problem
Current laser processing systems for semiconductor exposure and material processing face challenges in achieving precise control over beam divergence and pointing, leading to inconsistencies in the shape and accuracy of processed features, especially when dealing with high-integration semiconductor circuits and materials like polymers and glass.
Innovation Solution
A laser processing system that includes a divergence adjuster, a measuring instrument, and a processor to control the beam divergence and pointing of a pulse laser beam, ensuring that the beam divergences in both the V and H directions are adjusted to target values, allowing for precise control and stabilization of the beam's cross-sectional shape and position on the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If beam divergence is not adjusted, then the system is simpler, but the manufacturing precision of processed features deteriorates
Solution Approach 1:
The patent implements a feedback control system where beam divergences are measured by a measuring instrument and the divergence adjuster is controlled based on these measurements to approach target values. This closed-loop feedback mechanism ensures manufacturing precision while systematically managing the complexity through automated control.
Solution Approach 2:
The patent adjusts beam divergence parameters in both vertical and horizontal directions using a divergence adjuster. By changing these optical parameters to match target values, the system achieves precise control over the cross-sectional shape of processed features, resolving the contradiction between precision and complexity through parameter optimization.
2Stability of the object's composition
If beam divergence is not controlled, then the device is simpler, but the consistency of processed features deteriorates
Solution Approach 1:
The feedback control system continuously measures beam divergences and adjusts them to maintain consistency. This ensures that processed features have stable composition and consistent dimensions across different processing conditions, while the automated feedback mechanism manages the complexity of maintaining this stability.
Solution Approach 2:
Instead of trying to make the laser beam inherently stable through complex laser design, the patent inverts the approach by using a separate measurement and adjustment system. The beam divergence is measured and corrected after generation, achieving stability through post-generation control rather than pre-generation design.
3Manufacturing precision
If beam pointing is not stabilized, then the system is simpler, but the position accuracy on workpiece deteriorates
Solution Approach 1:
The patent uses a feedback control system that measures beam pointing position and adjusts the divergence adjuster to maintain the beam within the focal point tolerance range. This feedback mechanism ensures position accuracy on the workpiece while managing the complexity through automated measurement and adjustment.
4Manufacturing precision
If divergence adjuster is not used, then the device is simpler, but the dimensional control of processed holes deteriorates
Solution Approach 1:
The patent changes the beam divergence parameters in vertical and horizontal directions to control the cross-sectional shape of processed holes. By adjusting these parameters to match target values, the system achieves precise dimensional control while the systematic parameter management keeps the optical system complexity manageable.
Solution Approach 2:
The patent addresses hole dimension control by adding dimensional control in both vertical and horizontal directions independently. This two-dimensional parameter adjustment allows precise control of the cross-sectional shape, resolving the contradiction between dimensional control and system complexity through multi-dimensional optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the production of features with improved accuracy and consistency, reducing dimensional differences in the cross-sectional shape of processed holes and stabilizing the position of the laser beam on the workpiece, even under varying conditions such as temperature changes or electrode exhaustion.
Implementation Method 1
a laser apparatus configured to output a pulse laser beam
Implementation Method 2
a diffractive optical element configured to branch the pulse laser beam having passed through the measuring instrument
Data Source
AI summary
A laser processing system includes a laser apparatus configured to output a pulse laser beam, a divergence adjuster configured to adjust a first beam divergence in a first direction of the pulse laser beam and a second beam divergence in a second direction which intersects the first direction, a measuring instrument configured to measure the first and second beam divergences of the pulse laser beam having passed through the divergence adjuster, a diffractive optical element configured to branch the pulse laser beam having passed through the measuring instrument, and a processor configured to control the divergence adjuster such that the first and second beam divergences approach respective target values based on measurement results of the first and second beam divergences by the measuring instrument.