Optical Pulse Stretcher Alignment in a Sealed Camera-Guided Enclosure

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Solution Overview

Problem

Conventional methods for aligning optical components in optical pulse stretchers are time-consuming, risky, and prone to contamination due to the need for open beam operation, which complicates the alignment process and reduces the optical life of components.

Innovation Solution

A camera system is used to monitor beam positions within a sealed enclosure, integrating images from multiple optical features to facilitate precise alignment without exposing the components to open beam conditions, reducing manual intervention and contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional open beam alignment method is used, then alignment can be performed with simple equipment, but the optical components are exposed to contamination and UV radiation which reduces optical life and safety

Engineering Contradiction:
Improvealignment process simplicityVSAvoidcontamination and UV radiation exposure
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a sealed enclosure as an intermediary between the optical components and the external environment. This enclosure allows alignment operations to be performed without direct exposure of optical components to contamination and UV radiation, while still enabling the alignment process through controlled access points and integrated alignment tools within the sealed environment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the conventional mechanical open-beam alignment approach with an integrated alignment system that incorporates alignment tools, cameras, and adjustment mechanisms within the sealed enclosure. This substitution eliminates the need to open the enclosure during alignment, thereby protecting optical components while maintaining alignment capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If conventional open beam alignment method is used, then the alignment process can be performed manually, but it is time-consuming and requires breaking purge which increases service time

Engineering Contradiction:
Improvemanual alignment operationVSAvoidservice time and purge breaking
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent incorporates alignment tools, cameras, and adjustment mechanisms into the sealed enclosure during manufacturing, so that alignment can be performed without opening the enclosure. This preliminary integration eliminates the time-consuming steps of opening the enclosure, breaking purge, and manually positioning external alignment tools, thereby significantly reducing service time while maintaining ease of operation.

Inventive Principle:
Principle #10Preliminary action

3Duration of action of moving object

If larger optical pulse stretcher is used to increase TIS, then pulse length is improved, but the complexity and criticality of optical alignment increases

Engineering Contradiction:
Improvepulse length (TIS)VSAvoidoptical alignment complexity
Core Design Contradiction:
Duration of action of moving objectVSDevice complexity

Solution Approach 1:

The sealed enclosure acts as a protective intermediary that stabilizes the optical environment, reducing sensitivity to alignment drift and external disturbances. This allows larger optical pulse stretchers with more components to be aligned and maintained with greater ease, as the sealed environment minimizes contamination and environmental fluctuations that would otherwise increase alignment complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly improves safety and reduces service time by minimizing open beam exposure and eliminating the need to break purge, while ensuring accurate alignment of optical components.

Implementation Method 1

A camera system is used to monitor beam positions within a sealed enclosure

Methodology Applied
Scientific EffectLight detection: Photoelectric Effect

Implementation Method 2

integrating images from multiple optical features to facilitate precise alignment

Methodology Applied
Scientific EffectLight redirection and integration: Reflection

Data Source

PatentUS20240030671A1Apparatus for and method of optical component alignment
Publication Date: 2024.01.25 CYMER INC
  • US20240030671A1 patent drawing
  • US20240030671A1 patent drawing
  • US20240030671A1 patent drawing

AI summary

Apparatus for and method of aligning optical components such as beam splitters in an optical pulse stretcher in which a landing spot of a beam which has traversed a portion of the optical beam splitter and a coincident landing spot of a beam split from a retroreflected input beam are made to align on a target spot. Also disclosed is an apparatus and method for aligning the retroreflector to facilitate proper beam alignment. A fluorescent material may be used to render a beam landing spot visible.