Modular High-Power Pulse Supply for Capacitive Plasma Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high voltage and current efficiently to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches and the need for high-frequency operation.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration, where a control unit selectively activates and deactivates the generators to produce a step-function output with sharp edges, reducing the need for continuous slope generators and enhancing efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and current to capacitive loads, then the power delivery capability is sufficient, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The high-power generator is divided into multiple low-power generator modules (first LP-generator, second LP-generator, etc.), each capable of operating within safe voltage limits of semiconductor switches. These modules are connected in series through a coupling circuit to achieve the required high output voltage while maintaining reliable operation of individual switch components.
2Reliability
If multiple low-power generators are connected in series to achieve high voltage output, then the voltage handling capability is maintained, but the device complexity increases
Solution Approach 1:
Each low-power generator module is designed with identical or similar circuit architecture, including energy storage components, switching elements, and control circuits. This modular universality allows the system to achieve high voltage through series connection while simplifying design, manufacturing, and maintenance compared to a completely custom high-voltage circuit.
3Speed
If semiconductor switches are used for high-frequency operation, then the switching speed is sufficient for plasma processes, but the voltage handling possibilities are limited
Solution Approach 1:
The high voltage switching task is segmented across multiple low-voltage switches arranged in series. Each switch only needs to handle a fraction of the total voltage, allowing the use of standard semiconductor switches with proven high-frequency switching capabilities while maintaining reliable voltage handling through the series configuration.
4Productivity
If galvanically isolated connections are used for each switching unit to enable fast and effective switching, then the switching performance is improved, but the number of parts with failure risk increases
Solution Approach 1:
Multiple switching units are controlled through a common control signal distributed via fiber optic connections or magnetic coupling. This merging of control pathways reduces the number of independent galvanically isolated connections required, thereby reducing the total number of potential failure points while maintaining the fast switching performance needed for high-frequency plasma process control.
Data Source
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AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - the control unit (22) is further configured to select the contribution of LP-generators (14, 16, 18) in a galvanically isolated way, in particular via a fiber optic connection or magnetically coupling.