Pulse Transformer Layout for Narrower Gas Laser Spectral Width
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Solution Overview
Problem
Current gas laser apparatuses for semiconductor exposure suffer from chromatic aberration due to their large spectral line width, which affects the resolution of semiconductor integrated circuits during miniaturization and high integration processes.
Innovation Solution
A high voltage pulse generation device is integrated into the gas laser apparatus, utilizing transformer cores and pulse generation units to apply a pulse high voltage between discharge electrodes, narrowing the spectral line width of the laser light and reducing chromatic aberration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional gas laser apparatus is used for semiconductor exposure, then the exposure process can be performed, but chromatic aberration occurs due to large spectral line width, deteriorating resolution
Solution Approach 1:
The patent segments the pulse generation function into multiple independent pulse generation units (first, second, and third pulse generation units) that operate at different timings. This segmentation allows for precise control of the discharge process, enabling spectral line width narrowing while maintaining exposure functionality, thereby resolving the chromatic aberration issue without sacrificing resolution
2Manufacturing precision
If the spectral line width is narrowed to reduce chromatic aberration, then resolution improves, but the device complexity increases due to additional line narrowing modules
Solution Approach 1:
The patent merges the pulse generation function with the laser oscillation function into a single integrated system. The multiple pulse generation units are combined with the laser oscillation apparatus to work together, achieving spectral line width narrowing and chromatic aberration reduction without requiring separate line narrowing modules, thus avoiding increased device complexity
3Object-affected harmful factors
If multiple pulse generation units are used to control spectral line width, then chromatic aberration is reduced, but the control complexity increases
Solution Approach 1:
The patent implements feedback control by monitoring the spectral line width and adjusting the timing and duration of pulses from the multiple pulse generation units accordingly. This feedback mechanism automatically optimizes the discharge process to maintain the desired spectral characteristics, reducing chromatic aberration while simplifying operator control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively narrows the spectral line width of the laser light, reducing chromatic aberration and improving the resolution of semiconductor exposure processes, enhancing the miniaturization and integration capabilities of semiconductor integrated circuits.
Implementation Method 1
n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit
Implementation Method 2
apply a pulse high voltage between a pair of discharge electrodes arranged in a laser chamber
Data Source
AI summary
A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.