Pulse Width Extension Optics With Retractable Alignment Target
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Solution Overview
Problem
Existing laser devices used in semiconductor exposure apparatuses face challenges in alignment adjustment of optical axes due to the need for manual intervention, which prolongs the alignment process and exceeds the allowed working time in factory settings.
Innovation Solution
A retractable target system is integrated into the laser device, allowing targets for alignment adjustment to be moved in and out of the optical path without opening the device, thereby simplifying and speeding up the alignment process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment adjustment is performed by opening the device, then alignment precision can be achieved, but the alignment time is excessively long and device integrity is compromised
Solution Approach 1:
The alignment target is pre-integrated into the optical path inside the device housing. Before actual alignment work, the target is already in position, eliminating the need to open the device and manually install alignment tools during the alignment process. This preliminary preparation significantly reduces alignment time while maintaining precision.
Solution Approach 2:
A retractable alignment target serves as an intermediary element that facilitates alignment measurements without requiring device disassembly. The target can be extended into the optical path for measurements and retracted when not needed, acting as a mediator between the alignment process and the sealed device environment.
2Measurement precision
If manual alignment adjustment is performed by opening the device, then alignment precision can be achieved, but device integrity and internal environment are compromised
Solution Approach 1:
The alignment target is designed with retractability, allowing it to dynamically move between an extended position for alignment access and a retracted position that maintains device sealing. This dynamic capability enables alignment operations without permanently compromising device integrity or internal environment control.
Solution Approach 2:
The retractable target acts as an intermediary that provides alignment functionality without requiring device opening. By extending the target through a sealed aperture or mechanism, the system maintains device integrity and internal environment while still enabling precise alignment measurements.
3Ease of operation
If a fixed alignment target is used inside the device, then alignment can be performed, but the target may interfere with normal operation and increase device complexity
Solution Approach 1:
The alignment target is made retractable rather than fixed, allowing it to be extended only when alignment is needed and retracted during normal operation. This dynamic design minimizes interference with normal device function while maintaining alignment capability, and the retraction mechanism is integrated into the existing device structure to limit complexity increases.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The retractable target system enables rapid alignment adjustment of optical axes, reducing the time required for alignment and maintaining the integrity of the device's internal environment.
Implementation Method 1
a pulse width extension optical system including a beam splitter and a plurality of mirrors
Data Source
AI summary
A pulse width extension system configured to output entering pulse laser light with a pulse width thereof extended includes a pulse width extension optical system including a beam splitter and a plurality of mirrors; a case accommodating the pulse width extension optical system; at least one target allowing a part thereof irradiated with the pulse laser light to be determined; and a target moving mechanism capable of arranging the at least one target on an optical path of the pulse laser light including the pulse width extension optical system, and retracting the at least one target from the optical path.