Pulsed Electron Beam Imaging With Synchronized Detection Windows

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Solution Overview

Problem

Current electron microscopes face limitations in detection rates and noise levels, particularly for individual electron counting, due to increasing readout noise with decreasing measurement time, which affects image quality and count rates.

Innovation Solution

The implementation of a pulsed electron beam microscopy system that synchronizes detection windows with illumination windows, using single-photon avalanche photodiode (SPAD) detectors and beam deflectors to control the electron beam, thereby reducing spurious signal detection and improving time resolution to suppress noise and enhance image quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If measurement time is decreased to improve detection rate, then productivity increases, but readout noise increases causing measurement precision to deteriorate

Engineering Contradiction:
Improvedetection rateVSAvoidreadout noise
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies periodic action by using pulsed electron illumination instead of continuous illumination. The electron beam is delivered in synchronized pulses that match the periodic readout cycles of the detector, allowing measurement to occur only during specific time windows when the signal is present. This periodic synchronization enables high detection rates while maintaining low noise by excluding measurements during high-noise periods.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent implements preliminary action by pre-synchronizing the detector readout timing with the expected arrival of electron pulses. The detector is prepared and triggered in advance to be in the optimal low-noise state exactly when the electron signal arrives, rather than attempting to measure continuously. This preliminary synchronization ensures that measurements occur at the optimal moment for signal detection.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If thicker detector devices are used to increase detection capability, then productivity improves, but the counting process becomes implicit losing measurement precision

Engineering Contradiction:
Improvedetection capabilityVSAvoidcounting accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent uses timing synchronization as an intermediary mechanism to bridge the gap between thick detector devices and precise counting. By introducing temporal discrimination as an intermediate step, the system can process signals from thick detectors that would otherwise be indistinguishable, using the timing information to resolve individual electron events even when their energy signals overlap.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transitions from relying solely on energy dimension discrimination to incorporating the time dimension for electron detection. By adding temporal information as an additional discrimination dimension, the system can accurately count electrons from thicker detectors where energy signals overlap, using the unique timing of each electron arrival to distinguish individual events.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If continuous electron beam illumination is used to improve image quality, then measurement precision improves, but spurious signal detection increases

Engineering Contradiction:
Improveimage qualityVSAvoidspurious signal
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts only the useful signal portion by using temporal gating to accept measurements only during specific time windows when primary electron signals are expected. This extraction approach separates the desired signal from spurious signals that occur at different times, allowing high-quality imaging while rejecting background noise and artifacts generated during other periods.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the potentially harmful continuous beam operation into a benefit by using the known temporal structure of electron pulses to define acceptance windows. The periodic nature of the illumination, which could generate continuous spurious signals, is instead used as a timing reference to selectively accept only the useful signal portions, transforming the continuous operation into an advantage for signal discrimination.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for higher detection rates and improved image quality by reducing noise and spurious events, enabling more accurate electron counting and higher resolution imaging.

Implementation Method 1

the detector includes one or more single-photon avalanche photodiode (SPAD) detector elements

Methodology Applied
Scientific EffectAvalanche photodiode effect: Avalanche Breakdown

Implementation Method 2

a beam deflector arranged to provide a pulsed electron beam from the electron beam

Methodology Applied
Scientific EffectElectromagnetic deflection: Electromagnetic Induction

Data Source

PatentUS12165835B2Stroboscopic illumination synchronized electron detection and imaging
Publication Date: 2024.12.10 FEI CO
  • US12165835B2 patent drawing
  • US12165835B2 patent drawing
  • US12165835B2 patent drawing

AI summary

An apparatus includes an electron source coupled to provide an electron beam, a beam deflector arranged to provide a pulsed electron beam from the electron beam, a detector arranged to receive the pulsed electron beam after transmitting through a sample, and a controller coupled to control at least the beam deflector and the detector, the controller coupled to or including code that, when executed by the controller, causes the apparatus to establish the pulsed electron beam with pulse characteristics based on control of at least the beam deflector, wherein an illumination window is formed based on the pulse characteristics, the illumination window being a time frame when the sample is illuminated with a pulse of the pulsed electron beam, and to form a detection window for the detector and synchronize the detection window in relation to the illumination window, wherein detection events occurring in the detection window form the basis of an image, wherein the detection window determines a time frame when the detector converts the pulse of the pulsed electron beam transmitted through the sample to an electron induced signal.